Rene A. Claus

TL;DR: This work proposes an alternative method for solving the Transport of Intensity equation from a stack of through-focus intensity images taken by a microscope or lensless imager, which enables quantitative phase and amplitude imaging with improved accuracy and reduced data capture, while also being computationally efficient and robust to noise.

TL;DR: A general algorithm for combining measurements taken under various illumination and imaging conditions to quantitatively extract the amplitude and phase of an object wave is presented.

TL;DR: In this paper, a Kalman filtering method is used to recover the phase of a thin object illuminated by partially coherent light, which is fast, efficient, robust to noise, and able to handle arbitrary source shapes when used in a microscope with Kohler illumination.

TL;DR: In this paper, a weak object transfer function (WOTF) was applied to the measured through-focus aerial images to examine the amplitude and phase of the defects of extreme ultraviolet (EUV) lithography mask defects.

TL;DR: In this article, the authors evaluate mask roughness specifications explicitly from the actinic inspection perspective and demonstrate a significant discrepancy between atomic force microscopy (AFM) results and true EUV roughness as measured by actinic scattering.