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Roger F. Sinta

Researcher at Massachusetts Institute of Technology

Publications -  45
Citations -  1046

Roger F. Sinta is an academic researcher from Massachusetts Institute of Technology. The author has contributed to research in topics: Resist & Flash photolysis. The author has an hindex of 17, co-authored 45 publications receiving 1029 citations.

Papers
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Journal ArticleDOI

Encapsulation of Nanosized Silica by in Situ Polymerization of tert-Butyl Acrylate Monomer†

TL;DR: In this paper, the presence of the bound MPS agent and the polymer at the silica surface was determined by the attenuated total reflection infrared spectroscopy, while the amounts bound were assessed by the thermogravimetric analysis.
Patent

Optical fluids, and systems and methods of making and using the same

TL;DR: In this paper, a fluid composition comprising a perfluoroehter compound was presented, which has an absorbance of less than about 2 cm-1 at a wavelength of about 157 nm.
Proceedings ArticleDOI

Immersion liquids for lithography in the deep ultraviolet

TL;DR: In this article, the authors present simple calculations of the transmission and index homogeneity requirements of the immersion liquid (T > 0.95 and δn < 5×10-7 respectively for sin θ = NA/n = 0.9 and a working distance of 1 mm).
Journal ArticleDOI

Laser flash photolysis determination of absolute rate constants for reactions of bromine atoms in solution

TL;DR: The photodecomposition of vicinal dibromides at 266 nm produces bromine atoms with a quantum yield of ∼2.0 as mentioned in this paper, which results from an efficient primary photocleavage of a C-Br bond.
Journal ArticleDOI

Mechanistic Studies of Photoacid Generation from Substituted 4,6-Bis(trichloromethyl)-1,3,5-triazines

TL;DR: The photochemistry and photophysics of 2-methyl-1, 2-furylethylidene-2, and 2-methoxy)styryl-4,6-bis(trichloromethyl)-1,3,5-triazine (3) compounds have been investigated under conditions of direct excitation and using various phenothiazine derivatives as photosensitizers.