R
Roger F. Sinta
Researcher at Massachusetts Institute of Technology
Publications - 45
Citations - 1046
Roger F. Sinta is an academic researcher from Massachusetts Institute of Technology. The author has contributed to research in topics: Resist & Flash photolysis. The author has an hindex of 17, co-authored 45 publications receiving 1029 citations.
Papers
More filters
Journal ArticleDOI
Encapsulation of Nanosized Silica by in Situ Polymerization of tert-Butyl Acrylate Monomer†
TL;DR: In this paper, the presence of the bound MPS agent and the polymer at the silica surface was determined by the attenuated total reflection infrared spectroscopy, while the amounts bound were assessed by the thermogravimetric analysis.
Patent
Optical fluids, and systems and methods of making and using the same
TL;DR: In this paper, a fluid composition comprising a perfluoroehter compound was presented, which has an absorbance of less than about 2 cm-1 at a wavelength of about 157 nm.
Proceedings ArticleDOI
Immersion liquids for lithography in the deep ultraviolet
Michael Switkes,Roderick R. Kunz,Roger F. Sinta,Mordechai Rothschild,Paula M. Gallagher-Wetmore,Val J. Krukonis,Kara Williams +6 more
TL;DR: In this article, the authors present simple calculations of the transmission and index homogeneity requirements of the immersion liquid (T > 0.95 and δn < 5×10-7 respectively for sin θ = NA/n = 0.9 and a working distance of 1 mm).
Journal ArticleDOI
Laser flash photolysis determination of absolute rate constants for reactions of bromine atoms in solution
TL;DR: The photodecomposition of vicinal dibromides at 266 nm produces bromine atoms with a quantum yield of ∼2.0 as mentioned in this paper, which results from an efficient primary photocleavage of a C-Br bond.
Journal ArticleDOI
Mechanistic Studies of Photoacid Generation from Substituted 4,6-Bis(trichloromethyl)-1,3,5-triazines
TL;DR: The photochemistry and photophysics of 2-methyl-1, 2-furylethylidene-2, and 2-methoxy)styryl-4,6-bis(trichloromethyl)-1,3,5-triazine (3) compounds have been investigated under conditions of direct excitation and using various phenothiazine derivatives as photosensitizers.