Salman Iqbal

TL;DR: In this paper, the presence of the spurious sources modifies the measurement accuracy of these detectors and the experimental results obtained for the position measurement accuracy were compared with the results from the proposed mathematical model and it was seen that measured accuracy is within a fraction of a percent of the calculated one.

TL;DR: In this article, a multi-point diffraction strain sensor was developed using a moire interferometer with the added feature of whole-field strain determination, which was implemented by simultaneous tracking of sampled wavefront diffracted from the component under test.

TL;DR: In this article, a multichannel imaging position-sensitive detector has been developed and characterized, with the novel feature of simultaneous measurement of strain and tilt at a large array of points, using principles of diffraction to directly measure strain at the desired points.

TL;DR: In this article, the trench and contact hole shrink mechanism in negative tone develop resist processes and its manufacturability challenges associated for 20nm technology nodes and beyond are studied in detail, and the impact of time link delay on resolved critical dimension (CD) is fully characterized for patterned resist and etched geometries as a function of various process changes.

TL;DR: In this paper, a multipoint diffraction sensor was developed based on a normal moire interferometer, with the novel feature of whole field strain determination, along with the possibility of rotation and tilt determination.