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SeokJoo Doh

Publications -  1
Citations -  203

SeokJoo Doh is an academic researcher. The author has contributed to research in topics: Dielectric & Gate dielectric. The author has an hindex of 1, co-authored 1 publications receiving 198 citations.

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Three-dimensional imaging of individual hafnium atoms inside a semiconductor device

TL;DR: In this paper, a three-dimensional reconstruction of the Hf atom sites, representing a 3D map of potential breakdown sites within the gate dielectric, was demonstrated from a through-focal series of images.