S
SeokJoo Doh
Publications - 1
Citations - 203
SeokJoo Doh is an academic researcher. The author has contributed to research in topics: Dielectric & Gate dielectric. The author has an hindex of 1, co-authored 1 publications receiving 198 citations.
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Three-dimensional imaging of individual hafnium atoms inside a semiconductor device
Klaus van Benthem,Andrew R. Lupini,Miyoung Kim,Hionsuck Baik,SeokJoo Doh,Jong-Ho Lee,Mark P. Oxley,Scott D. Findlay,Leslie J. Allen,Julia T. Luck,Stephen J. Pennycook +10 more
TL;DR: In this paper, a three-dimensional reconstruction of the Hf atom sites, representing a 3D map of potential breakdown sites within the gate dielectric, was demonstrated from a through-focal series of images.