Journal ArticleDOI
Three-dimensional imaging of individual hafnium atoms inside a semiconductor device
Klaus van Benthem,Andrew R. Lupini,Miyoung Kim,Hionsuck Baik,SeokJoo Doh,Jong-Ho Lee,Mark P. Oxley,Scott D. Findlay,Leslie J. Allen,Julia T. Luck,Stephen J. Pennycook +10 more
Reads0
Chats0
TLDR
In this paper, a three-dimensional reconstruction of the Hf atom sites, representing a 3D map of potential breakdown sites within the gate dielectric, was demonstrated from a through-focal series of images.Abstract:
The aberration-corrected scanning transmission electron microscope allows probes to be formed with less than 1-A diameter, providing sufficient sensitivity to observe individual Hf atoms within the SiO2 passivating layer of a HfO2∕SiO2∕Si alternative gate dielectric stack. Furthermore, the depth resolution is sufficient to localize the atom positions to half-nanometer precision in the third dimension. From a through-focal series of images, we demonstrate a three-dimensional reconstruction of the Hf atom sites, representing a three-dimensional map of potential breakdown sites within the gate dielectric.read more
Citations
More filters
Journal ArticleDOI
The problem with determining atomic structure at the nanoscale.
Simon J. L. Billinge,Igor Levin +1 more
TL;DR: An overview of various classes of nanostructured materials is provided and it is suggested that successful solutions to these nanostructure problems will involve interactions among researchers from materials science, physics, chemistry, computer science, and applied mathematics, working within a “complex modeling” paradigm.
Journal ArticleDOI
Imaging and dynamics of light atoms and molecules on graphene.
Jannik C. Meyer,Jannik C. Meyer,Caglar Girit,Caglar Girit,Michael F. Crommie,Michael F. Crommie,Alex Zettl,Alex Zettl +7 more
TL;DR: On a clean single-layer graphene membrane, adsorbates such as atomic hydrogen and carbon can be seen as if they were suspended in free space, and directly image such individual adatoms, along with carbon chains and vacancies, and investigate their dynamics in real time, opening a way to reveal dynamics of more complex chemical reactions or identify the atomic-scale structure of unknown adsorbate.
Journal ArticleDOI
Band gap engineering and layer-by-layer mapping of selenium-doped molybdenum disulfide.
Yongji Gong,Zheng Liu,Zheng Liu,Andrew R. Lupini,Gang Shi,Junhao Lin,Junhao Lin,Sina Najmaei,Zhong Lin,Ana Laura Elías,Ayse Berkdemir,Ge You,Humberto Terrones,Mauricio Terrones,Mauricio Terrones,Robert Vajtai,Sokrates T. Pantelides,Sokrates T. Pantelides,Stephen J. Pennycook,Jun Lou,Wu Zhou,Pulickel M. Ajayan +21 more
TL;DR: The synthesis of molybdenum disulfide substitutionally doped with a broad range of selenium concentrations is reported, resulting in over 10% optical band gap modulations in atomic layers, providing new insights into the growth mechanism and alloying behavior in two-dimensional dichalcogenide atomic layers.
Journal ArticleDOI
Single dopants in semiconductors
TL;DR: The huge advances in the past decade towards observing, controllably creating and manipulating single dopants, as well as their application in novel devices which allow opening the new field of solotronics (solitary dopant optoelectronics).
Journal ArticleDOI
Studying atomic structures by aberration-corrected transmission electron microscopy.
TL;DR: An entirely new generation of instruments enables studies in condensed-matter physics and materials science to be performed at atomic- scale resolution, meeting the growing demand of nanosciences and nanotechnology for the atomic-scale characterization of materials, nanosynthesized products and devices, and the validation of expected functions.
References
More filters
BookDOI
Transmission Electron Microscopy
TL;DR: The client would like to get a larger, approximately 3 cm in diameter, well fixed tissue sample, together with a detailed report of the clinical presentation, gross, and microscopic lesions, along with the submission of samples prepared in a similar manner by the client for processing.
Journal ArticleDOI
Reconstruction of Three Dimensional Structures from Electron Micrographs
D. J. De Rosier,Aaron Klug +1 more
TL;DR: General principles are formulated for the objective reconstruction of a three dimensional object from a set of electron microscope images and applied to the calculation of aThree dimensional density map of the tail of bacteriophage T4.
Book
Transmission Electron Microscopy
Ludwig Reimer,H. Kohl +1 more
TL;DR: Particle Optics of Electrons as mentioned in this paper, wave and wave-optics of electrons, and wave and phase contrast of Electron Spectroscopy have been studied extensively in the literature.
Journal ArticleDOI
3D electron microscopy in the physical sciences: the development of Z-contrast and EFTEM tomography
Paul A. Midgley,Matthew Weyland +1 more
TL;DR: Examples of how STEM dark-field imaging and energy-filtered TEM can be used successfully to examine nearly all types of specimens likely to be encountered by the physical scientist are presented.
Journal ArticleDOI
Sub-ångstrom resolution using aberration corrected electron optics
TL;DR: The implementation of a computer-controlled aberration correction system in a scanning transmission electron microscope, which is less sensitive to chromatic aberration, is reported here and allows dynamic imaging of single atoms, clusters of a few atoms, and single atomic layer ‘rafts' of atoms coexisting with Au islands on a carbon substrate.