Part I. Silicon Photonics - Introduction: 1. Fabless Silicon Photonics: 1.1 Introduction 1.2 Silicon photonics - the next fabless semiconductor industry 1.3 Applications 1.4 Technical challenges and the state of the art 1.5 Opportunities 2. Modelling and Design Approaches: 2.1 Optical Waveguide Mode Solver 2.2 Wave Propagation 2.3 Optoelectronic models 2.4 Microwave Modelling 2.5 Thermal Modelling 2.6 Photonic Circuit Modelling 2.7 Physical Layout 2.8 Software Tools Integration Part II. Silicon Photonics - Passive Components: 3. Optical Materials and Waveguides: 3.1 Silicon-on-Insulator 3.2 Waveguides 3.3 Bent waveguides 3.4 Code Listings 3.5 Problems 4. Fundamental Building Blocks: 4.1 Directional couplers 4.2 Y-Branch 4.3 Mach-Zehnder Interferometer 4.4 Ring resonators 4.5 Waveguide Bragg Grating Filters 4.6 Code Listings 4.7 Problems 5. Optical I/O: 5.1 The challenge of optical coupling to silicon photonic chips 5.2 Grating Coupler 5.3 Edge Coupler 5.4 Polarization 5.5 Code Listings 5.6 Problems Part III. Silicon Photonics - Active Components: 6. Modulators: 6.1 Plasma Dispersion E 6.2 PN Junction Phase Shifter 6.3 Micro-ring Modulators 6.4 Forward-biased PIN Junction 6.5 Active Tuning 6.6 Thermo-Optic Switch 6.7 Code Listings 6.8 Problems 7. Detectors: 7.1 Performance Parameters 7.2 Fabrication 7.3 Types of detectors 7.4 Design Considerations 7.5 Detector modelling 7.5.2 Electronic Simulations 7.6 Code Listings 7.7 Problems 8. Lasers: 8.1 External Lasers 8.2 Laser Modelling 8.3 Co-Packaging 8.4 Hybrid Silicon Lasers 8.5 Monolithic Lasers 8.6 Alternative Light Sources 8.7 Problems Part IV. Silicon Photonics - System Design: 9. Photonic Circuit Modelling: 9.1 Need for photonic circuit modelling 9.2 Components for System Design 9.3 Compact Models 9.4 Directional Coupler - Compact Model 9.5 Ring Modulator - Circuit Model 9.6 Grating Coupler - S Parameters 9.7 Code Listings 10. Tools and Techniques: 10.1 Process Design Kit (PDK) 10.2 Mask Layout 11. Fabrication: 11.1 Fabrication Non-Uniformity 11.2 Problems 12. Testing and Packaging: 12.1 Electrical and Optical Interfacing 12.2 Automated Optical Probe Stations 12.3 Design for Test 13. Silicon Photonic System Example: 13.1 Wavelength Division Multiplexed Transmitter.

Silicon Photonics Design: From Devices to Systems

This review surveys micromachined gyroscope structure and circuitry technology The principle of micromachined gyroscopes is first introduced Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes Next, the control electronics of micromachined gyroscopes are analyzed The control circuits are categorized into typical circuitry and special circuitry technologies The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail

The Development of Micromachined Gyroscope Structure and Circuitry Technology

In this paper, we present a brief history of silicon photonics from the early research papers in the late 1980s and early 1990s, to the potentially revolutionary technology that exists today. Given that other papers in this special issue give detailed reviews of key aspects of the technology, this paper will concentrate on the key technological milestones that were crucial in demonstrating the capability of silicon photonics as both a successful technical platform, as well as indicating the potential for commercial success. The paper encompasses discussion of the key technology areas of passive devices, modulators, detectors, light sources, and system integration. In so doing, the paper will also serve as an introduction to the other papers within this special issue.

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The Emergence of Silicon Photonics as a Flexible Technology Platform

Something very surprising has been happening in photonics recently: the same foundries and processes that were developed to build transistors are being repurposed to build chips that can generate, detect, modulate, and otherwise manipulate light. This is pretty counterintuitive, since the electronics industry spends billions of dollars to develop tools, processes, and facilities that lend themselves to building the very best transistors without any thought about how to make these processes compatible with photonics (with the obvious exception of the processes designed to make CMOS and CCD camera chips).

Silicon Photonics: The Next Fabless Semiconductor Industry

Postgraduate Students: Vladimír Arnot, Daniel Čapek, Rudolf Čejka, Dao Minh, Tomá Dulík, Martin Hrubý, Radek Kočí, Petr Kotásek, Marek Křejpský, Bohuslav Křena, Vladislav Kubíček, Vladimír Marek, Petr Matouek, Ale Mičín, Jiří Očenáek, Tomá Ondráček, Petr Peňás, Jaroslav Ráb, Richard Růička, Luká Sekanina, Ivan Schwarz, Azedien Sllame, Petr Smolík, Jiří Staroba, Josef Strnadel, Luká Szemla, Pavel Tinovský, Michal Tomů, Milan Urbáek, Michal Vojkůvka, Petr Vurm, Frantiek Zbořil

Department of Computer Science and Engineering

We report a new silicon Microelectromechanical systems (MEMS) accelerometer based on differential frequency modulation (FM) with experimentally demonstrated thermal compensation over a dynamic temperature environment and $\mu g$ -level Allan deviation of bias. The sensor architecture is based on resonant frequency tracking in a vacuum packaged silicon-on-insulator (SOI) tuning fork oscillator. To address drift over temperature, the MEMS sensor die incorporates two identical tuning forks with opposing axes of sensitivity. Demodulation of the differential FM output from the two simultaneously operated oscillators eliminates common mode errors and provides an FM output with continuous thermal compensation. The first SOI prototype with quality factor of 350000 was built and characterized over a temperature range between 30 °C and 75 °C. Temperature characterization of the FM accelerometer showed less than a 0.5% scale-factor change throughout a temperature range from 30 °C to 75 °C, without any external compensation. This is enabled by an inherently differential frequency output, which cancels common-mode influences, such as those due to temperature. Allan deviation of the differential FM accelerometer revealed a bias instability of $6\,\, \mu \text{g}$ at 20 s, along with an elimination of any temperature drift due to increases in averaging time. After comparing the measured bias instability with the designed linear range of 20 g, the sensor demonstrates a wide dynamic range of 130 dB. A second design iteration of the FM accelerometer, vacuum-sealed with getter material, was created to maximize $Q$ -factor, and thereby frequency resolution. A $Q$ -factor of 2.4 million was experimentally demonstrated, with a time constant of >20 min.

High Quality Factor Resonant MEMS Accelerometer With Continuous Thermal Compensation

We report characterization of a silicon MEMS rate gyroscope with measured sub-deg/hr bias stability, enabled by the quality factor (Q) of 1.1 million. The rate sensor utilizes degenerate, dynamically balanced Quadruple Mass Gyroscope (QMG) design, which suppresses substrate energy dissipation and maximizes Q-factors. We demonstrated a 0.9°/hr in-run bias stability and a 0.06°/√hr rate noise density for the 0.1 mTorr vacuum packaged QMG with a 0.2 Hz mode-mismatch between drive- and sense-modes. This level of noise allowed detection of azimuth with 150 mrad precision, showing feasibility of a QMG for gyrocompassing.

http://www.alexandertrusov.com/uploads/pdf/2011-transducers-prikhodko-zotov-trusov-shkel.pdf

Sub-degree-per-hour silicon MEMS rate sensor with 1 million Q-factor

We report, for the first time, an angular rate sensor based on mechanical frequency modulation (FM) of the input rotation rate. This approach tracks the resonant frequency split between two X - Y symmetric high-Q mechanical modes of vibration in a microelectromechanical systems Coriolis vibratory gyroscope to produce a frequency-based measurement of the input angular rate. The system is enabled by a combination of a MEMS vibratory high-Q gyroscope and a new signal processing scheme which takes advantage of a previously ignored gyroscope dynamic effect. A real-time implementation of the quasi-digital angular rate sensor was realized using two digital phase-locked loops and experimentally verified using a silicon MEMS quadruple mass gyroscope (QMG). Structural characterization of a vacuum- packaged QMG showed Q factors on the order of one million over a wide temperature range from -40 °C to +100°C with a relative x/y mismatch of Q of 1 %. Temperature characterization of the FM rate sensor exhibited less than 0.2% variation of the angular rate response between 25°C and 70 °C environments, enabled by the self-calibrating differential frequency detection. High-speed rate table characterization of the FM angular rate sensor demonstrated a linear range of 18 000 deg/s (50 r/s, limited by the setup) with a dynamic range of 128 dB. Interchangeable operation of the QMG transducer in conventional amplitude- modulated and new FM regimes provides a 156-dB dynamic range.

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High-Range Angular Rate Sensor Based on Mechanical Frequency Modulation

We report a new family of ultra high- Q silicon microelectromechanical systems (MEMS) tuning fork gyroscopes demonstrating angular rate and, for the first time, rate integrating (whole angle) operation. The novel mechanical architecture maximizes the Q-factor and minimizes frequency and damping mismatches. We demonstrated the vacuum packaged SOI dual and quadruple mass gyroscopes with Q-factors of 0.64 and 0.86 million at 2 kHz operational frequency, respectively. Due to the stiffness and damping symmetry, the quadruple mass gyroscope was instrumented to measure the angle of rotation directly, eliminating the bandwidth and dynamic range limitations of conventional MEMS vibratory rate gyroscopes. The technology may enable silicon micromachined devices for inertial guidance applications previously limited to precision-machined quartz hemispherical resonator gyroscopes.

/pdf/low-dissipation-silicon-tuning-fork-gyroscopes-for-rate-and-4cmufn39rj.pdf

Low-Dissipation Silicon Tuning Fork Gyroscopes for Rate and Whole Angle Measurements

North-finding based on micromachined gyroscopes is an attractive possibility. This paper analyzes north-finding methods and demonstrates a measured 4 mrad standard deviation azimuth uncertainty using an in-house developed vibratory silicon MEMS quadruple mass gyroscope (QMG). We instrumented a vacuum packaged QMG with isotropic Q-factor of 1.2 million and Allan deviation bias instability of 0.2 °/hr for azimuth detection by measuring the earth's rotation. Continuous rotation (“carouseling”) produced azimuth datapoints with uncertainty diminishing as the square root of the number of turns. Integration of 100 datapoints with normally distributed errors reduced uncertainty to 4 mrad, beyond the noise of current QMG instrumentation. We also implemented self-calibration methods, including in-situ temperature sensing and discrete ±180° turning (“maytagging” or two-point gyrocompassing) as potential alternatives to carouseling. While both mechanizations produced similar azimuth uncertainty, we conclude that carouseling is more advantageous as it is robust to bias, scale-factor, and temperature drifts, although it requires a rotary platform providing continuous rotation. Maytagging, on the other hand, can be implemented using a simple turn table, but requires calibration due to temperature-induced drifts.

/pdf/what-is-mems-gyrocompassing-comparative-analysis-of-3gwby4zng8.pdf

Sergei A. Zotov

Papers

High Quality Factor Resonant MEMS Accelerometer With Continuous Thermal Compensation

Sub-degree-per-hour silicon MEMS rate sensor with 1 million Q-factor

High-Range Angular Rate Sensor Based on Mechanical Frequency Modulation

Low-Dissipation Silicon Tuning Fork Gyroscopes for Rate and Whole Angle Measurements

What is MEMS Gyrocompassing? Comparative Analysis of Maytagging and Carouseling