S
Stanislav Mráz
Researcher at RWTH Aachen University
Publications - 61
Citations - 1476
Stanislav Mráz is an academic researcher from RWTH Aachen University. The author has contributed to research in topics: Thin film & Sputter deposition. The author has an hindex of 17, co-authored 53 publications receiving 1143 citations.
Papers
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Influence of the negative oxygen ions on the structure evolution of transition metal oxide thin films
TL;DR: In this article, the energy distributions of O− ions of magnetron sputtered Nb, Ta, Zr and Hf in an Ar∕O2 atmosphere were measured as a function of the oxygen partial pressure.
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Experiment and simulation of the compositional evolution of Ti–B thin films deposited by sputtering of a compound target
Jörg Neidhardt,Stanislav Mráz,Jochen M. Schneider,Erik Strub,Wolfgang Bohne,Bartosz Liedke,Wolfhard Möller,Christian Mitterer +7 more
TL;DR: In this paper, the evolution of the coating stoichiometry with pressure, target-substrate distance, and angle was analyzed for dc sputtering of TixB (x=0.5, 1, 1.6) compound targets by elastic recoil detection analysis.
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The physical reason for the apparently low deposition rate during high-power pulsed magnetron sputtering
TL;DR: Konstantinidis et al. as mentioned in this paper used transport-of-ions-in-matter simulations to analyze the non-linear energy dependence of the sputtering yields and showed that the apparently low deposition rate can be explained based on the nonlinear energy dependency.
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Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films
Kostas Sarakinos,A. Braun,C. Zilkens,Stanislav Mráz,Jochen M. Schneider,H. Zoubos,Panos Patsalas +6 more
TL;DR: Amorphous carbon films are also deposited using high power impulse magnetron sputtering (HiPIMS) at pulsing frequencies of 250-Hz and 1-kHz as mentioned in this paper, where unipolar pulsed negative bias voltages up to 150-V are applied to the substrate to tune the energy of the positively charged ions that bombard the growing film.
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Energy distribution of O− ions during reactive magnetron sputtering
TL;DR: In this paper, low, medium, and high energy O− ion populations were experimentally detected during magnetron sputtering of Al in an Ar∕O2 atmosphere, based on calculations, the authors propose that nonsputtered O− ions originating from the target surface are accelerated in the cathode fall, while sputtered ions may be excluded as a significant contribution to the high energy ion population.