This paper reviews the state-of-the art in vibration energy harvesting for wireless, self-powered microsystems. Vibration-powered generators are typically, although not exclusively, inertial spring and mass systems. The characteristic equations for inertial-based generators are presented, along with the specific damping equations that relate to the three main transduction mechanisms employed to extract energy from the system. These transduction mechanisms are: piezoelectric, electromagnetic and electrostatic. Piezoelectric generators employ active materials that generate a charge when mechanically stressed. A comprehensive review of existing piezoelectric generators is presented, including impact coupled, resonant and human-based devices. Electromagnetic generators employ electromagnetic induction arising from the relative motion between a magnetic flux gradient and a conductor. Electromagnetic generators presented in the literature are reviewed including large scale discrete devices and wafer-scale integrated versions. Electrostatic generators utilize the relative movement between electrically isolated charged capacitor plates to generate energy. The work done against the electrostatic force between the plates provides the harvested energy. Electrostatic-based generators are reviewed under the classifications of in-plane overlap varying, in-plane gap closing and out-of-plane gap closing; the Coulomb force parametric generator and electret-based generators are also covered. The coupling factor of each transduction mechanism is discussed and all the devices presented in the literature are summarized in tables classified by transduction type; conclusions are drawn as to the suitability of the various techniques.

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Energy harvesting vibration sources for microsystems applications

The field of power harvesting has experienced significant growth over the past few years due to the ever-increasing desire to produce portable and wireless electronics with extended lifespans. Current portable and wireless devices must be designed to include electrochemical batteries as the power source. The use of batteries can be troublesome due to their limited lifespan, thus necessitating their periodic replacement. In the case of wireless sensors that are to be placed in remote locations, the sensor must be easily accessible or of a disposable nature to allow the device to function over extended periods of time. Energy scavenging devices are designed to capture the ambient energy surrounding the electronics and convert it into usable electrical energy. The concept of power harvesting works towards developing self-powered devices that do not require replaceable power supplies. A number of sources of harvestable ambient energy exist, including waste heat, vibration, electromagnetic waves, wind, flowing water, and solar energy. While each of these sources of energy can be effectively used to power remote sensors, the structural and biological communities have placed an emphasis on scavenging vibrational energy with piezoelectric materials. This article will review recent literature in the field of power harvesting and present the current state of power harvesting in its drive to create completely self-powered devices.

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A review of power harvesting using piezoelectric materials (2003–2006)

Human skin is a remarkable organ. It consists of an integrated, stretchable network of sensors that relay information about tactile and thermal stimuli to the brain, allowing us to maneuver within our environment safely and effectively. Interest in large-area networks of electronic devices inspired by human skin is motivated by the promise of creating autonomous intelligent robots and biomimetic prosthetics, among other applications. The development of electronic networks comprised of flexible, stretchable, and robust devices that are compatible with large-area implementation and integrated with multiple functionalities is a testament to the progress in developing an electronic skin (e-skin) akin to human skin. E-skins are already capable of providing augmented performance over their organic counterpart, both in superior spatial resolution and thermal sensitivity. They could be further improved through the incorporation of additional functionalities (e.g., chemical and biological sensing) and desired properties (e.g., biodegradability and self-powering). Continued rapid progress in this area is promising for the development of a fully integrated e-skin in the near future.

25th Anniversary Article: The Evolution of Electronic Skin (E-Skin): A Brief History, Design Considerations, and Recent Progress

Enabling technologies for wireless sensor networks have gained considerable attention in research communities over the past few years. It is highly desirable, even necessary in certain situations, for wireless sensor nodes to be self-powered. With this goal in mind, a vibration based piezoelectric generator has been developed as an enabling technology for wireless sensor networks. The focus of this paper is to discuss the modeling, design, and optimization of a piezoelectric generator based on a two-layer bending element. An analytical model of the generator has been developed and validated. In addition to providing intuitive design insight, the model has been used as the basis for design optimization. Designs of 1 cm3 in size generated using the model have demonstrated a power output of 375 µW from a vibration source of 2.5 m s−2 at 120 Hz. Furthermore, a 1 cm3 generator has been used to power a custom designed 1.9 GHz radio transmitter from the same vibration source.

https://iopscience.iop.org/article/10.1088/0964-1726/13/5/018/pdf

A piezoelectric vibration based generator for wireless electronics

Energy harvesting generators are attractive as inexhaustible replacements for batteries in low-power wireless electronic devices and have received increasing research interest in recent years. Ambient motion is one of the main sources of energy for harvesting, and a wide range of motion-powered energy harvesters have been proposed or demonstrated, particularly at the microscale. This paper reviews the principles and state-of-art in motion-driven miniature energy harvesters and discusses trends, suitable applications, and possible future developments.

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Energy Harvesting From Human and Machine Motion for Wireless Electronic Devices

Vibration energy harvesting is receiving a considerable amount of interest as a means for powering wireless sensor nodes This paper presents a small (component volume 01 cm3, practical volume 015 cm3) electromagnetic generator utilizing discrete components and optimized for a low ambient vibration level based upon real application data The generator uses four magnets arranged on an etched cantilever with a wound coil located within the moving magnetic field Magnet size and coil properties were optimized, with the final device producing 46 µW in a resistive load of 4 k? from just 059 m s-2 acceleration levels at its resonant frequency of 52 Hz A voltage of 428 mVrms was obtained from the generator with a 2300 turn coil which has proved sufficient for subsequent rectification and voltage step-up circuitry The generator delivers 30% of the power supplied from the environment to useful electrical power in the load This generator compares very favourably with other demonstrated examples in the literature, both in terms of normalized power density and efficiency

/pdf/a-micro-electromagnetic-generator-for-vibration-energy-acpebp9i50.pdf

A micro electromagnetic generator for vibration energy harvesting

This paper describes the design of miniature generators capable of converting ambient vibration energy into electrical energy for use in powering intelligent sensor systems. Such a device acts as the power supply of a microsystem which can be used in inaccessible areas where wires can not be practically attached to provide power or transmit sensor data. Two prototypes of miniature generator are described and experimental results presented. Prototype A is based around two magnets coupled to a coil attached to a cantilever; prototype B is based around four magnets. For prototype A, experimental results are given for its resonant frequency and its open circuit and loaded output as a function of vibration amplitude. For prototype B, experimental results are given for the generator's Q factor in air and vacuum, its output voltage as a function of vibration amplitude as well as its magnetic field strength. This generator has been tested on a car engine and shown to produce a peak power of 3.9 mW with an average power of 157 micro watts.

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An electromagnetic, vibration-powered generator for intelligent sensor systems

A device is described for generating electrical power from mechanical energy in a vibrating environment. The design utilises an electromagnetic transducer and its operating principle is based on the relative movement of a magnet pole with respect to a coil. The approach is suitable for embedded remote microsystems structures with no physical links to the outside world. Simulation, modelling and test results following fabrication of a first prototype have demonstrated that generation of practical amounts of power within a reasonable space is possible. Power generation of more than 1 mW within a volume of 240 mm3 at a vibration frequency of 320 Hz has been obtained.

Design and fabrication of a new vibration-based electromechanical power generator

As MEMS and Smart Material technologies advance, embedded and remote applications are becoming more widespread. Powering these systems can be a significant engineering problem, as traditional solutions such as batteries are not always appropriate. An inertial generator is developed that uses thick-film piezoelectric technologies to produce electrical power from vibrations in the environment of the device. The device validates the concept, and produces an output of 3uW. Predictions show that orders of magnitude increase in power output are possible.

Steve Beeby

Papers

A micro electromagnetic generator for vibration energy harvesting

An electromagnetic, vibration-powered generator for intelligent sensor systems

Design and fabrication of a new vibration-based electromechanical power generator

Towards a piezoelectric vibration-powered microgenerator

MEMS Mechanical Sensors