T
Tomizo Kurosawa
Researcher at National Institute of Advanced Industrial Science and Technology
Publications - 82
Citations - 1462
Tomizo Kurosawa is an academic researcher from National Institute of Advanced Industrial Science and Technology. The author has contributed to research in topics: Interferometry & Laser. The author has an hindex of 19, co-authored 82 publications receiving 1366 citations. Previous affiliations of Tomizo Kurosawa include Japanese Ministry of International Trade and Industry.
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Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope
TL;DR: In this paper, the precision measurements of 240 nm-pitch one-dimensional grating standards were carried out using an atomic force microscope (AFM) with a high-resolution three-axis laser interferometer (nanometrological AFM).
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Real-time, interferometrically measuring atomic force microscope for direct calibration of standards
Satoshi Gonda,T. Doi,Tomizo Kurosawa,Yoshihisa Tanimura,Nahoko Hisata,Takeshi Yamagishi,Hiroyuki Fujimoto,H. Yukawa +7 more
TL;DR: An atomic force microscope with a high-resolution three-axis laser interferometer for real-time correction of distorted topographic images has been constructed and investigated in this paper, where standard samples for a scanning probe microscope can be directly calibrated on the basis of stabilized wavelength of He-Ne lasers.
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Geometric calibration of a coordinate measuring machine using a laser tracking system
TL;DR: The estimated parametric errors of the CMM agreed with those estimated by a ball plate measurement, which demonstrates the validity of the proposed calibration system.
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The first measurement of a three-dimensional coordinate by use of a laser tracking interferometer system based on trilateration
TL;DR: In this article, a three-dimensional coordinate of a target position was measured using a laser tracking interferometer system based on laser trilateration, which is mounted on two-directional rotating stages, track the motion of the target retroreflector.
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Whole-viewing-angle cat's-eye retroreflector as a target of laser trackers
TL;DR: A spherical cat's-eye retroreflector made from a glass material having a refractive index of two was developed and the geometrical sphericity of the cat's eye and theSphericity examined optically were approximately 100 nm and 500 nm respectively.