U
U. Wakino
Publications - 2
Citations - 45
U. Wakino is an academic researcher. The author has contributed to research in topics: Polycrystalline silicon & Silicon. The author has an hindex of 2, co-authored 2 publications receiving 45 citations.
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Polycrystalline silicon formed by ultrahigh‐vacuum sputtering system
TL;DR: In this article, the authors used an ultrahigh-vacuum (UHV) sputtering system to grow polycrystalline silicon films at substrate temperatures under 500°C.
Journal ArticleDOI
Effect of hydrogen ion shower doping in polycrystalline silicon thin‐film transistors
TL;DR: In this article, the effect of hydrogen ion shower doping on polycrystallinesilicon thin-film transistors (p•Si TFTs) was investigated and it was shown that the threshold voltage shift depends on the hydrogen content of the channel region.