V
Virinder Grewal
Researcher at Applied Materials
Publications - 3
Citations - 112
Virinder Grewal is an academic researcher from Applied Materials. The author has contributed to research in topics: Etching (microfabrication) & Ceramic capacitor. The author has an hindex of 3, co-authored 3 publications receiving 112 citations.
Papers
More filters
Patent
Chemical vapor deposition chamber with dual frequency bias and method for manufacturing a photomask using the same
TL;DR: In this article, a method and apparatus for process integration in the manufacture of a photomask is described, including a vacuum transfer chamber coupled with at least one hard mask deposition chamber and a plasma chamber configured for etching chromium.
Patent
Method for etching high-aspect-ratio features
Ajay Kumar,Anisul Khan,Dragan Podlesnik,Sharma V. Pamarthy,Axel Henke,Stephan Wege,Virinder Grewal +6 more
TL;DR: In this paper, a method for operating a plasma reactor to etch high-aspect-ratio features on a workpiece in a vacuum chamber is described, which comprises the performance of an etch process followed by a flash process.