Abstract Piezoelectric microelectromechanical systems (PiezoMEMS) are attractive for developing next generation self-powered microsystems. PiezoMEMS promises to eliminate the costly assembly for microsensors/microsystems and provide various mechanisms for recharging the batteries, thereby, moving us closer towards batteryless wireless sensors systems and networks. In order to achieve practical implementation of this technology, a fully assembled energy harvester on the order of a quarter size dollar coin (diameter=24.26 mm, thickness=1.75 mm) should be able to generate about 100 μW continuous power from low frequency ambient vibrations (below 100 Hz). This paper reviews the state-of-the-art in microscale piezoelectric energy harvesting, summarizing key metrics such as power density and bandwidth of reported structures at low frequency input. This paper also describes the recent advancements in piezoelectric materials and resonator structures. Epitaxial growth and grain texturing of piezoelectric materials is being developed to achieve much higher energy conversion efficiency. For embedded medical systems, lead-free piezoelectric thin films are being developed and MEMS processes for these new classes of materials are being investigated. Non-linear resonating beams for wide bandwidth resonance are also reviewed as they would enable wide bandwidth and low frequency operation of energy harvesters. Particle/granule spray deposition techniques such as aerosol-deposition (AD) and granule spray in vacuum (GSV) are being matured to realize the meso-scale structures in a rapid manner. Another important element of an energy harvester is a power management circuit, which should maximize the net energy harvested. Towards this objective, it is essential for the power management circuit of a small-scale energy harvester to dissipate minimal power, and thus it requires special circuit design techniques and a simple maximum power point tracking scheme. Overall, the progress made by the research and industrial community has brought the energy harvesting technology closer to the practical applications in near future.

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A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits

Piezoelectric energy harvesting has attracted wide attention from researchers especially in the last decade due to its advantages such as high power density, architectural simplicity, and scalability. As a result, the number of studies on piezoelectric energy harvesting published in the last 5 years is more than twice the sum of publications on its electromagnetic and electrostatic counterparts. This paper presents a comprehensive review on the history and current state-of-the art of piezoelectric energy harvesting. A brief theory section presents the basic principles of piezoelectric energy conversion and introduces the most commonly used mechanical architectures. The theory section is followed by a literature survey on piezoelectric energy harvesters, which are classified into three groups: (i) macro- and mesoscale, (ii) MEMS scale, and (iii) nanoscale. The size of a piezoelectric energy harvester affects a variety of parameters such as its weight, fabrication method, achievable power output level, and potential application areas. Consequently, size-based classification provides a reliable and effective basis to study various piezoelectric energy harvesters. The literature survey on each scale group is concluded with a summary, potential application areas, and future directions. In a separate section, the most prominent challenges in piezoelectric energy harvesting and the studies focusing on these challenges are discussed. The conclusion part summarizes the current standing of piezoelectric energy harvesters as possible candidates for various applications and discusses the issues that need to be addressed for realization of practical piezoelectric energy harvesting devices.

Piezoelectric energy harvesting: State-of-the-art and challenges

Research and applications of viscoelastic vibration damping materials: A review

Energy harvesting from a vehicle suspension system

A multimodal hybrid energy harvester based on piezoelectric-electromagnetic mechanisms for low-frequency ambient vibrations

A piezoelectric energy harvester is an electromechanical device that converts ambient mechanical vibration into electric power. Most existing vibration energy harvesting devices operate effectively at a single frequency only, dictated by the design of the device. This frequency must match the frequency of the host structure vibration. However, real world structural vibrations rarely have a specific constant frequency. Therefore, piezoelectric harvesters that generate usable power across a range of exciting frequencies are required to make this technology commercially viable. Currently known harvester tuning techniques have many limitations, in particular they miss the ability to work during harvester operation and most often cannot perform a precise tuning. This paper describes the design and testing of a vibration energy harvester with tunable resonance frequency, wherein the tuning is accomplished by changing the attraction force between two permanent magnets by adjusting the distance between the magnets. This tuning technique allows the natural frequency to be manipulated before and during operation of the harvester. Furthermore the paper presents a physical description of the frequency tuning effect. The experimental results achieved with a piezoelectric bimorph fit the calculated results very well. The calculation and experimental results show that using this tuning technique the natural frequency of the harvester can be varied efficiently within a wide range: in the test setup, the natural frequency of the piezoelectric bimorph could be increased by more than 70%.

https://iopscience.iop.org/article/10.1088/0964-1726/21/3/035019/pdf

Frequency tuning of piezoelectric energy harvesters by magnetic force

Power and bandwidth of piezoelectric harvesters can be increased by using multiple piezoelectric elements in one harvester. In this contribution, a novel energy harvesting cantilever array with magnetic tuning including three piezoelectric bimorphs is investigated theoretically and experimentally, with a good agreement between model and experiment. Other than harvester designs proposed before, this array is easy to manufacture and insensitive to manufacturing tolerances because its optimum operation frequency can be re-adjusted after fabrication. Using the superposition principle, the Butterworth-Van Dyke model and a mechanical lumped parameters model, the generated voltage and current are determined analytically. Formulas for calculating the power generated by array harvesters with an arbitrary number of piezoelectric elements connected in series or in parallel are derived. It is shown that optimum harvester design must take both the connected load and the operating frequency into account. Strategies for connecting multiple bimorphs to increase the maximum generated power and/or enhance the bandwidth compared to a single bimorph harvester are investigated. For bandwidth enhancement it is essential that individual rectifiers are used for the bimorphs. An example with three bimorphs shows that, depending on the chosen tuning strategy, the power is increased by about 340% or the bandwidth is increased by about 500%, compared to one single bimorph.

Enhanced energy harvesting using multiple piezoelectric elements: Theory and experiments

Piezoelectric structures are nowadays used in many different applications. A better understanding of the influence of material properties and geometrical design on the performance of these structur...

Analytical determination of characteristic frequencies and equivalent circuit parameters of a piezoelectric bimorph

A piezoelectric cantilever beam with a tip mass at its free end is a common energy harvester configuration. This article introduces a new principle of designing such a harvester that increases the generated power without changing the resonance frequency of the harvester: the attraction force between two permanent magnets is used to add stiffness to the system. This magnetic stiffening counters the effect of the tip mass on the efficient operation frequency. Five set-ups incorporating piezoelectric bimorph cantilevers of the same type in different mechanical configurations are compared theoretically and experimentally to investigate the feasibility of this principle: theoretical and experimental results show that magnetically stiffened harvesters have important advantages over conventional set-ups with and without tip mass. They generate more power while only slightly increasing the deflection in the piezoelectric harvester and they can be tuned across a wide range of excitation frequencies.

Increasing the power of piezoelectric energy harvesters by magnetic stiffening

In this paper, an analytical solution describing the deflection of a cracked beam repaired with piezoelectric patch is introduced. The solution is derived using perturbation method. A novel analytical model to calculate the proper dimensions of piezoelectric patches used to repair cracked beams is also introduced. This model shows that the thickness of the piezoelectric patch depends mainly on the thickness of the cracked beam, the electro-mechanical properties of the patch material, the applied load and the crack location. Furthermore, the model shows that the length of the piezoelectric patches depends on the thickness of the patch as well as it depends on the length of the cracked beam and the crack depth. The additional flexibility of the beam caused by crack is modeled depending on a dimensionless parameter identified from finite elements method. Different piezoelectric patches were designed and investigated using analytical and finite elements models. The results show that increasing the patch thickness enhances the beam resistance to crack and load effects, while increasing the length of the piezoelectric patch reduces the magnitude of the voltage required to repair the cracked beam.

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Waleed Al-Ashtari

Papers

Frequency tuning of piezoelectric energy harvesters by magnetic force

Enhanced energy harvesting using multiple piezoelectric elements: Theory and experiments

Analytical determination of characteristic frequencies and equivalent circuit parameters of a piezoelectric bimorph

Increasing the power of piezoelectric energy harvesters by magnetic stiffening

A Novel Analytical Model to Design Piezoelectric Patches Used to Repair Cracked Beams