Wilfried Hortschitz

TL;DR: The detection of force-induced displacements within compact MEMS (microelectromechanical system) devices can be used to measure electric field strength without significant field distortion.

TL;DR: The presented microoptoelectromechanical system sensor modulates a light flux by means of two congruently placed aperture gratings: one etched into a seismic mass and the other fixed to the sensor package.

TL;DR: In this article, an optoelectronic conversion method for relative displacement is presented, where an optical modulator responding to acceleration and gravitation is used for characterization, and a prototype exhibits a promising high sensitivity of 60 nA/nm, featuring a noise level of about 8 pm/√Hz.

TL;DR: In this paper, a passive thermal micro-actuator with large area specific work and large displacement, fabricated of electroplated nickel on a silicon substrate, is presented, which relies on the thermal expansion of beams in a V-shaped geometry.

TL;DR: In this article, the authors present a way of utilizing the surrounding air to adjust the passive damping of a laterally oscillating micromechanical system, which is shown to hold in a relatively wide range by comparing analytical models and finite volume method simulations with measurements of a number of micro-electro-mechanical test structures with optical readout.