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Wolfgang Harnisch
Researcher at Synopsys
Publications - 4
Citations - 31
Wolfgang Harnisch is an academic researcher from Synopsys. The author has contributed to research in topics: Aerial image & Mask inspection. The author has an hindex of 2, co-authored 4 publications receiving 31 citations. Previous affiliations of Wolfgang Harnisch include Carl Zeiss AG.
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Patent
Method for mask inspection for mask design and mask production
TL;DR: In this article, the authors proposed a mask inspection method that can be used for the design and production of masks, in order to detect relevant weak points early on and to correct the same.
Patent
Process to inspect masks for weak spots uses aerial image simulation to produce a list of critical points or hotspots, which is analyzed using Aerial Imaging Measurement system to compare real with simulated images
TL;DR: In this paper, an aerial image simulation is carried out of the mask design to produce a list of critical points or hotspots, which are then used to improve the mask's performance.
Patent
Material for forming resist protective film and resist pattern forming method using the same
TL;DR: In this paper, the authors proposed a mask inspection method that can be used for the design and production of masks, in order to detect relevant weak points early on and to correct the same.
Patent
Verfahren zur Maskeninspektion im Rahmen des Maskendesigns und der Maskenherstellung
TL;DR: In this paper, a vorliegende erfindung betrifft ein Verfahren zur Maskeninspektion, welches im Rahmen des Maskendesigns der Maskenherstellung eingesetzt werden kann, um relevante Schwachstellen bereits fruhzeitig erkennen and korrigieren zu konnen.