Showing papers by "Xiangzhao Wang published in 2017"
TL;DR: A depth-dependent dispersion compensation algorithm for enhancing the image quality of the Fourier-domain optical coherence tomography (OCT) is presented and it is found that this algorithm can improve image quality at full depth.
Abstract: A depth-dependent dispersion compensation algorithm for enhancing the image quality of the Fourier-domain optical coherence tomography (OCT) is presented. The dispersion related with depth in the sample is considered. Using the iterative method, an analytical formula for compensating the depth-dependent dispersion in the sample is obtained. We apply depth-dependent dispersion compensation algorithm to process the phantom images and in vivo images. Using sharpness metric based on variation coefficient to compare the results processed with different dispersion compensation algorithms, we find that the depth-dependent dispersion compensation algorithm can improve image quality at full depth.
21 citations
TL;DR: An automatic spectral calibration method by seeking the optimal calibration coefficient between wavenumber kH and kV, suitable in both Gaussian and non-Gaussian spectrums with a higher calibration accuracy is proposed.
Abstract: Accurate wavelength assignment is important for Fourier domain polarization-sensitive optical coherence tomography. Incorrect wavelength mapping between the orthogonal horizontal (H) and vertical (V) polarization channels leads to broadening the axial point spread function and generating polarization artifacts. To solve the problem, we propose an automatic spectral calibration method by seeking the optimal calibration coefficient between wavenumber kH and kV. The method first performs a rough calibration to get the relationship between the wavelength λ and the pixel number x of the CCD for each channel. And then a precise calibration is taken to bring both polarization interferograms in the same k range through the optimal calibration coefficient. The optimal coefficient is automatically obtained by evaluating the cross-correlation of A-line signals. Simulations and experiments are implemented to demonstrate the performance of the proposed method. The results show that, compared to the peaks method, the proposed method is suitable in both Gaussian and non-Gaussian spectrums with a higher calibration accuracy.
6 citations
TL;DR: In this article, the authors presented a strictly mathematical proof that the numerical orthogonal transformation method (NOT) is identical to the difference Zernike polynomial fitting method (DZF).
Abstract: The Zernike-polynomials-based modal reconstruction method is an important wavefront reconstruction method for lateral shearing interferometry. There are four typical Zernike-polynomial-based modal reconstruction methods: the Rimmer-Wyant method, the elliptical orthogonal transformation method, the numerical orthogonal transformation method (NOT), and the difference Zernike polynomial fitting method (DZF). In a previous paper [Appl. Opt. 51, 5028 (2012)], the overall performances of these four methods were comprehensively compared with each other. The conclusions showed that NOT and DZF have the highest reconstruction accuracies among these four methods. In addition, it was shown that the performance of NOT is identical to that of DZF; however, the reason behind this was not known until now, to our knowledge. In the present paper, we present a strictly mathematical proof for this highly significant result. (C) 2016 Optical Society of America
4 citations
TL;DR: In this paper, the authors showed that the relative reconstruction error is <5% if the grid size of the sampled difference fronts is more than four times the radial order of difference Zernike polynomials with a reasonable noise level and shear ratio.
Abstract: The computation time of wavefront reconstruction is decreased by sampling the difference fronts in the present study. The wavefront can be reconstructed with high accuracy up to 64 Zernike terms with only 32×32 sampled pixels. Furthermore, the computational efficiency can be improved by a factor of more than 1000, and the measurement efficiency of lateral shearing interferometry is improved. The influence of the terms used to reconstruct the wavefront, the grid size of the test wavefront, the shear ratio, and the random noise on the reconstruction accuracy is analyzed and compared, when the difference fronts are sampled with different grid sizes. Numerical simulations and experiments show that the relative reconstruction error is <5% if the grid size of the sampled difference fronts is more than four times the radial order of difference Zernike polynomials with a reasonable noise level and shear ratio.
3 citations
TL;DR: In this article, the deformation of the lens surface, the variance of refractive index and the change of optical path are considered in thermal aberration analysis, and a strategy for optimizing projection lens design is proposed and used to optimize thermal behavior of a projection lens.
Abstract: In optical lithography tools, thermal aberration of a projection lens, which is caused by lens heating, leads to degradation of imaging quality. In addition to in-line feedforward compensation technology [1], the thermal aberration can be reduced by optimizing projection lens design. Thermal aberration analysis of a projection lens benefits the optimization of projection lens design. In this paper, thermal aberration analysis methods using physical model and simplified model are compared. Physical model of lens heating provides accurate thermal aberration analysis, but it is unable to analyze the contribution of an element of the lens to thermal aberration which is significant for thermal optimization[2]. Simplified model supports thermal analysis of an element of a lens[3]. However, only the deformation of lens surface and the variance of refractive index are considered in the simplified model. The thermal aberration analysis, in this paper, shows not only the deformation of lens surface, the variance of refractive index but also the change of optical path should be considered in thermal aberration analysis. On the basis of the analysis, a strategy for optimizing projection lens design is proposed and used to optimize thermal behavior of a lithography projection lens. The RMS value of thermal aberration is reduced by 31.8% in steady state.
2 citations