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Xiangzhao Wang
Researcher at Chinese Academy of Sciences
Publications - 225
Citations - 1602
Xiangzhao Wang is an academic researcher from Chinese Academy of Sciences. The author has contributed to research in topics: Interferometry & Wavefront. The author has an hindex of 18, co-authored 223 publications receiving 1422 citations. Previous affiliations of Xiangzhao Wang include Chongqing Normal University.
Papers
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White-light interferometer with high sensitivity and resolution using multi-mode fibers
TL;DR: In this paper, the authors investigate theoretically and experimentally the characteristics of interferometric signals of a white-light interferometer employing multi-mode fibers as transport media and a broadband laser diode as light source.
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Calibration method of overlay measurement error caused by asymmetric mark.
TL;DR: A new method is proposed for calibrating the overlay measurement error introduced by the asymmetric mark, which is based on the relationship between measurement data of the overlay mark and the single layer mark, and the validity is verified by simulation with different types of asymmetrical mark.
Journal Article
Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer
TL;DR: In this paper, a real-time laser diode (LD) interferometer for displacement measurement is proposed and its measurement principle is analyzed, and the measurement time was less than 26 microseconds.
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Method for improving measurement efficiency of lateral shearing interferometry
TL;DR: In this paper, the authors showed that the relative reconstruction error is <5% if the grid size of the sampled difference fronts is more than four times the radial order of difference Zernike polynomials with a reasonable noise level and shear ratio.
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Parallel plate interferometer with a reflecting mirror for measuring angular displacement
TL;DR: In this article, a parallel plate interferometer with a reflecting mirror for measuring angular displacement is proposed, where a deflection angle of a beam caused by an angular displacement was amplified by use of reflecting mirror to increase the optical path difference (OPD) in the plane-parallel plate, which provided high sensitivity of the phase measurement.