Part I: Background and Fundamentals Introduction, Mohamed Gad-el-Hak, University of Notre Dame Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University Liquid Flows in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University Lubrication in MEMS, Kenneth S. Breuer, Brown University Physics of Thin Liquid Films, Alexander Oron, Technion, Israel Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame Part II: Design and Fabrication Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University MEMS Fabrication, Marc J. Madou, Nanogen, Inc. LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc. X-Ray-Based Fabrication, Todd Christenson, Sandia National Laboratories Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center Microfabricated Chemical Sensors for Aerospace Applications, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc. Packaging of Harsh-Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center Part III: Applications of MEMS Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc. Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison Sensors and Actuators for Turbulent Flows. Lennart Loefdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories Microrobotics Thorbjoern Ebefors and Goeran Stemme, Royal Institute of Technology, Sweden Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc. Microdroplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan Micro Heat Pipes and Micro Heat Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology Flow Control, Mohamed Gad-el-Hak, University of Notre Dame) Part IV: The Future Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame Index

The MEMS Handbook

This paper reports an electrostatic microelectromechanical systems (MEMS) gripper with an integrated capacitive force sensor. The sensitivity is more than three orders of magnitude higher than other monolithically fabricated MEMS grippers with force feedback. This force sensing resolution provides feedback in the range of the forces that dominate the micromanipulation process. A MEMS ultrasonic device is described for aligning microobjects suspended in water using ultrasonic fields. The alignment of the particles is of a sufficient accuracy that the microgripper must only return to a fixed position in order to pick up particles less than 100 mum in diameter. The concept is also demonstrated with HeLa cells, thus providing a useful tool in biological research and cell assays

Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field

Biological cell injection is laborious work that requires lengthy training and suffers from a low success rate. In this paper, a robotic cell-injection system for automatic injection of batch-suspended cells is proposed. To facilitate the process, these suspended cells are held and fixed to a cell array by a specially designed cell-holding device, and injected one by one through an ldquoout-of-planerdquo cell-injection process. A micropipette equipped with a polyvinylidene fluoride microforce sensor to measure real-time injection force is integrated in the proposed system. Through calibration, an empirical relationship between the cell-injection force and the desired injector pipette trajectory is obtained in advance. Then, after decoupling the out-of-plane cell injection into a position control in the X - Y horizontal plane and an impedance control in the Z -axis, a position and force control algorithm is developed to control the injection pipette. The depth motion of the injector pipette, which cannot be observed by microscope, is indirectly controlled via the impedance control, and the desired force is determined from the online X - Y position control and cell calibration results. Finally, experimental results demonstrate the effectiveness of the proposed approach.

Robotic Cell Injection System With Position and Force Control: Toward Automatic Batch Biomanipulation

This paper presents the analysis, design, and characterization of a superelastic alloy (NiTi) microgripper with integrated electromagnetic actuators and piezoelectric force sensors. The microgripper, fabricated by electro-discharge machining, features force sensing capability, large force output, and large displacements to accommodate objects of various sizes. The design parameters for the embedded electromagnetic actuators were selected on the basis of finite element sensitivity analysis. In order to make the microgripper capable of resolving gripping forces, piezoelectric force sensors were fabricated and integrated into the microgripper. The performance of the microgripper, the integrated force sensors, and the electromagnetic actuators was experimentally evaluated. A satisfactory match between experimental results and finite element simulations was obtained. Furthermore, comparison studies demonstrated that the superelastic alloy (NiTi) microgripper was capable of producing larger displacement than a stainless steel microgripper. Finally, experimental results of optical fiber alignment and the manipulation of tiny biological tissues with the superelastic microgripper were presented.

https://iopscience.iop.org/article/10.1088/0964-1726/14/6/019/pdf

A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric force sensors: a numerical and experimental study

Micro-scaled parts with dimension below 1 mm need to be manipulated with high precision and consistency in order to guarantee successful microassembly process. Often these requirements are difficult to be achieved particularly due to the problems associated with the structural integrity of the grasping mechanism which will affect the accuracy of the manipulation. Furthermore, the object's texture and fragility imply that small perturbation by the grasping mechanism can result in substantial damage to the object and leads to the degradation of its geometry, shape, and quality. This paper focuses on the unification of two designing approaches to develop a compliant-based microgripper for performing high precision manipulation of micro-objects. A combination of Pseudo Rigid Body Model (PRBM) and Finite Element Analysis (FEA) technique has proven to improve the design efficiency by providing the essential guideline to expedite the prototyping procedure which effectively reduces the cost and modeling time. An Electro Discharge Machining (EDM) technique was utilized for the fabrication of the device. Series of experimental studies were conducted for performance verification and the results are compared with the computational analysis results. A high displacement amplification and maximum stroke of 100 μm can be achieved.

Development of a novel flexure-based microgripper for high precision micro-object manipulation

The technology barrier that micromanipulation presents to many emerging fields requires that control and assembly issues in ultra-high precision motion control be addressed. In this article, we first discuss the important differences that exist between microassembly and traditional automatic assembly. We then overview ongoing efforts in microassembly and approaches being pursued. The use of vision-based feedback has been identified as one of the more promising approaches for controlling the microassembly process, and the field of visual servoing is discussed. Applications of the field to micropositioning are demonstrated. The importance of force in assembly is obvious, and developments in force sensing at the scales required are also discussed. As microassembly matures and robust, economical micromanipulation strategies are developed. Microelectromechanical system (MEMS) designers will envision a myriad of new hybrid MEMS devices previously thought impossible to manufacture.

Sensor-based microassembly of hybrid MEMS devices

In micro-domain applications, such as assembly of hybrid mi- croelectromechanical systems, optical microscopes form a critical com- ponent of visually based microassembly systems. In order to effectively use vision feedback to guide manipulation strategies using a broad range of optical microscope configurations, accurately calibrated para- metric models of optical microscopes are required. Although many cali- bration techniques exist for macroscopic camera-lens systems, there is a dearth of literature on calibration of parametric microscope models. Op- tical microscope calibration has unique characteristics that are quite dif- ferent from normal camera calibration, including (1) unique calibration parameters; (2) calibration patterns that must be parallel to the image plane, and (3) restriction to single-plane calibration. In this paper, we propose a parametric microscope model and calibration algorithm spe- cifically for optical microscopes. Our approach extends existing camera calibration techniques to include the unique parameters of optical micro- scopes and also allows the use of a single calibration plane perpendicu- lar to the optical axis. The validity and accuracy of our proposed micro- scope calibration method are tested by experiments. © 1999 Society of Photo-Optical Instrumentation Engineers. (S0091-3286(99)02412-5)

Calibration of a parametric model of an optical microscope

It is well known that surface effect forces such as van der Waals, electrostatic, and surface tension forces dominate part interactions as part dimensions fall below approximately 100 microns. Many researchers have suggested manipulation strategies that either diminish the effect of these forces or use these forces to advantage. There is little work, however, that comprehensively analyzes, both theoretically and experimentally, the exact contributions of such phenomena as surface roughness, material properties, environmental conditions, etc. to part interactions at microscales. This paper describes our work in developing a high resolution force sensor using optical beam deflection techniques for characterizing object interactions at the microscale. The interactions among a variety of micropart shapes and materials of varying surface roughness and conductivity were analyzed under various environmental conditions. Experimental results of this analysis are presented.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

Adhesion force modeling and measurement for micromanipulation

This paper presents our work in developing a force controlled microgripper and micrograsping strategies using optical beam deflection techniques. The optical beam deflection sensor is based on modified atomic force microscopy techniques and is able to resolve forces below a nano-Newton. A variety of gripper fingers made from materials with different conductivity and surface roughness is analyzed theoretically and experimentally using the force sensor. These results provide insight into the mechanics of micromanipulation, and the results are used to develop micrograsping strategies. A design of a microfabricated force controlled microgripper is presented along with initial experimental results in applying various gripping forces to microparts. The results demonstrate the important role gripping force plays in the grasping and releasing of microparts.

The effect of material properties and gripping force on micrograsping

For microassembly tasks uncertainty exists at many levels. Single static sensing configurations are therefore unable to provide feedback with the necessary range and resolution for accomplishing many desired tasks. In this paper we present experimental results that investigate the integration of two disparate sensing modalities, force and vision, for sensor-based microassembly. By integrating these sensing modes, we are able to provide feedback in a task-oriented frame of reference over a broad range of motion with an extremely high precision. An optical microscope is used to provide visual feedback down to micron resolutions, while an optical beam deflection technique (based on a modified atomic force microscope) is used to provide nanonewton level force feedback or nanometric level position feedback. Visually servoed motion at speeds of up to 2 mm/s with a repeatability of 0.17 mm are achieved with vision alone. The optical beam deflection sensor complements the visual feedback by providing positional feedback with a repeatability of a few nanometers. Based on the principles of optical beam deflection, this is equivalent to force measurements on the order of a nanonewton. The value of integrating these two disparate sensing modalities is demonstrated during controlled micropart impact experiments. These results demonstrate micropart approach velocities of 80 mm/s with impact forces of 9 nN and final contact forces of 2 nN. Within our microassembly system this level of performance cannot be achieved using either sensing modality alone. This research will aid in the development of complex hybrid MEMS devices in two ways; by enabling the microassembly of more complex MEMS prototypes; and in the development of automatic assembly machines for assembling and packaging future MEMS devices that require increasingly complex assembly strategies.

Yu Zhou

Papers

Sensor-based microassembly of hybrid MEMS devices

Calibration of a parametric model of an optical microscope

Adhesion force modeling and measurement for micromanipulation

The effect of material properties and gripping force on micrograsping

Integrating Optical Force Sensing with Visual Servoing for Microassembly