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Fig. 3. Topographic signals of square lattices with 3D features in parallelogram holes and hills in (a) and (b); the correspondent correlation filtered signals are in (c) and(d)respectively.
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Journal Article
•
DOI
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Correlation and convolution filtering and image processing for pitch evaluation of 2D micro- and nano-scale gratings and lattices.
[...]
Xiaomei Chen
1
,
Ludger Koenders
2
,
Simon Parkinson
3
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Institutions (3)
Cranfield University
1
,
German National Metrology Institute
2
,
University of Huddersfield
3
20 Mar 2017
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Applied Optics