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Table 2 Inter-comparison of pitch evaluation results among the PD-, CG- and FT-method.
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Journal Article
•
DOI
•
Correlation and convolution filtering and image processing for pitch evaluation of 2D micro- and nano-scale gratings and lattices.
[...]
Xiaomei Chen
1
,
Ludger Koenders
2
,
Simon Parkinson
3
•
Institutions (3)
Cranfield University
1
,
German National Metrology Institute
2
,
University of Huddersfield
3
20 Mar 2017
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Applied Optics