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Proceedings ArticleDOI

Development of a Dual-axis Optoelectronic Precision Level

Kuang-Chao Fan, +3 more
- Vol. 8321, pp 891-899
TLDR
In this paper, a commercially available DVD pickup head is adopted as the angle sensor in association with the double-layer pendulum mechanism for dual-axis swings, and measured angles of both axes are processed by a microprocessor and displayed on a LCD or exported to an external PC.
Abstract: 
This paper presents the design principle and applications of a innovative dual-axis optoelectronic level. A commercially available DVD pickup head is adopted as the angle sensor in association with the double-layer pendulum mechanism for dual-axis swings. A mass-damping system is analyzed to model the mechanical dynamics. Measured angles of both axes are processed by a microprocessor and displayed on a LCD or exported to an external PC. Compared with a triple-beam laser angular interferometer, the error of the dual-axis optoelectronic level is better than ±0.5 arc-seconds in the measuring range of ±20 arc-seconds, and the settling time is within 0.5 sec. Two experimental results show the consistency with a Renishaw interfereometer and its practical use in industry.

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Citations
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DESIGN NOTE: The development of a low-cost focusing probe for profile measurement

K. C. Fan, +2 more
TL;DR: In this article, a high-precision optical probe based on the principle of focusing-range detection is developed, which is used to measure the S-curve within the focusing range of a CD player.
References
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Journal ArticleDOI

Joint-Angle Measurement Using Accelerometers and Gyroscopes—A Survey

Peng Cheng, +1 more
- 01 Feb 2010 - 
TL;DR: This paper focuses on the comparison of four different inertial-sensor combination methods that are reported in reference papers and utilizes the theory of rigid-body kinematics to explain and analyze their advantages and weaknesses.
Journal ArticleDOI

A 6-degree-of-freedom measurement system for the accuracy of X-Y stages

Kuang-Chao Fan, +1 more
- 01 Jan 2000 - 
TL;DR: In this paper, a precision 6-degree-of-freedom measurement system was developed for simultaneous on-line measurements of six motion errors of an X-Y stage, which employs four laser Doppler scales and two quadrant photo detectors to detect the positions and the rotations of an optical reflection device mounted on the top of the XY stage.
Journal ArticleDOI

The development of a low-cost focusing probe for profile measurement

Kuang-Chao Fan, +2 more
- 01 Jan 2000 - 
TL;DR: In this article, a high-precision optical probe based on the principle of focusing-range detection is developed, which is used to measure the S-curve within the focusing range of a CD player.
Journal ArticleDOI

An autocollimator based on the laser head of a compact disc player

T R Armstrong, +1 more
- 01 Nov 1992 - 
TL;DR: In this article, the design and construction of a small compact autocollimator based on the laser head of a compact disc player is described, which provides a cheap and simple means of measuring angles over a total angular range of 1200 mu rad (approximately 200 arcsec) with a resolution of better than + or 0.006 mu rad.
Journal ArticleDOI

Simultaneous detection of translational and angular displacements of micromachined elements

En-Te Hwu, +4 more
- 28 Nov 2007 - 
TL;DR: In this article, an astigmatic detection system is constructed with a modified digital-versatile-disk optical head, with a detecting spot of ∼1μm, which can simultaneously measure the vertical displacements and two-dimensional angular tilts of micromachined elements.