Patent
Displacement measurement system and method thereof
Reads0
Chats0
TLDR
In this article, a displacement measurement system including a coherent light source, a two-dimensional grating, a photo sensor, and a signal processing apparatus is provided, where a zero-order light beam interferes with two first-order diffraction beams in different directions, so that corresponding interference fringes are formed on the photo sensor.Abstract:
A displacement measurement system including a coherent light source, a two-dimensional grating, a photo sensor, and a signal processing apparatus is provided. After the coherent light beam enters the two-dimensional grating, a zero-order light beam and a plurality of first-order diffraction beams are generated. The zero-order light beam interferes with two of the first-order beams in different directions, so that corresponding interference fringes are formed on the photo sensor. Accordingly, when the two-dimensional grating moves, displacements of the two-dimensional grating in the different directions are obtained by calculating phase differences of the interference fringes in the corresponding directions. Besides, when the two-dimensional grating rotates, the rotational angle of the two-dimensional grating is obtained from the corresponding rotational angle of a diffraction pattern of the first-order diffraction beams.read more
Citations
More filters
Patent
Two-slit interference fringe decoding spectrum confocal displacement sensor and displacement measurement method thereof
TL;DR: In this paper, a two-slit interference fringe decoding spectrum confocal displacement sensor and a displacement measurement method thereof were proposed, and the displacement sensor was shown to be low in cost, good in linearity and high in resolution ratio, and meanwhile an instrument was simple in structure and easy to machine.
Patent
System and method for compensating instability in an autofocus system
TL;DR: An autofocus system and method designed to account for instabilities in the system, e.g. due to vibrating mirrors, optics, etc) and/or environmental effects such as refractive index changes of air due to temperature, atmospheric pressure, or humidity gradients, is provided in this paper.
Patent
Two-dimensional displacement measurement device
TL;DR: In this article, the authors proposed a two-dimensional displacement measurement device, which consists of an optical maser, a beam-expanding mirror, a reflecting mirror, semi-reflecting semi-permeable mirror, and a 2D measurement optical grating.
Patent
Optical encoder including displacement sensing normal to the encoder scale grating surface
TL;DR: In this article, a displacement sensor configuration, comprising a scale grating disposed in a first direction; and a scale light imaging configuration which includes first and second optical paths and a detector including first and two detector portions.
Patent
Method and device for incoherent imaging with coherent diffractive reconstruction
TL;DR: In this paper, the authors describe a system to determine the axial and/or lateral location of a particle using light modulated with temporal and spatial modulation pattern. But the system is not suitable for the detection of a single particle.
References
More filters
Patent
Lithographic Apparatus and Device Manufacturing Method
코엔 구르만,스토얀 니흐티아노프,바르트 레오나르트 페터 더마르크,마리아 엘자베스 로이만-후이스켄,에릭 로엘로프 루프스트라,미첼 리펜,예뢴 요한네스 소피아 마리아 메르텐스,보리스 멘치트치코프,리하르트 모에르만,마르첼 요한누스 엘리자베스 후베르투스 무이트옌스,데르 네트 안토니우스 요한누스 반,메르 아쉬빈 로데비요크 헨드리쿠스 요한네스 반,마르티누스 코르넬리스 마리아 베르하겐,야코부스 요한누스 레오나르두스 헨드리쿠스 베어스파이요,헤어만 붐,마르틴 프랑스 피에르 슈메츠,마르코 코에르트 슈타벤가,요한네스 헨리쿠스 빌헬무스 야콥스,프란시스쿠스 얀센,유스트 예뢴 오텐스,테오도루스 페트루스 마리아 카데,요한네스 안나 콰에다커스,카테 니콜라스 텐,파트리시우스 알로이시우스 야코부스 틴네만스 +23 more
TL;DR: In this article, an illumination system is used to condition a radiation beam and support is provided by a patterning device that can form a patterned radiation beam, which is then projected onto a target portion of the substrate.
Patent
Optical detection apparatus for detecting information relating to relative displacement of an object on whch a diffraction grating is formed
TL;DR: In this article, the authors propose an apparatus for optically detecting information relating to the relative displacement of an object on which a diffraction grating, arranged in two axial directions with a predetermined pitch, is placed.
Journal ArticleDOI
Simultaneous detection of translational and angular displacements of micromachined elements
TL;DR: In this article, an astigmatic detection system is constructed with a modified digital-versatile-disk optical head, with a detecting spot of ∼1μm, which can simultaneously measure the vertical displacements and two-dimensional angular tilts of micromachined elements.
Patent
Method for measuring two-dimensional displacement using conjugate optics
TL;DR: In this paper, a method for measuring two-dimensional displacement using conjugate optics comprises the steps of emitting an incident beam onto a diffraction element to generate many firstly diffracted beams, selecting two axially symmetric beams of the same order of diffraction from the first diffracted beam, introducing corresponding sets of wavefront reconstruction optics to reflect the two selected beams back onto the same incident spot along the same optical paths and generating many secondly diffracted beacons.
Journal ArticleDOI
Nanoscale displacement measurement in a variable-air-gap optical waveguide
Chen Fan,Zhuangqi Cao,Qishun Shen,Xiaoxu Deng,Biming Duan,Wen Yuan,Minghuang Sang,Shengqian Wang +7 more
TL;DR: In this paper, an alternative approach by monitoring changes in the intensity of the light reflected from a variable-air-gap optical waveguide is presented in order to detect slight displacement.