Journal ArticleDOI
Fabrication and applications of piezo-and ferroelectric films
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TLDR
In this paper, different thin film fabrication techniques of ferro-and piezoelectric materials are described with special emphasis on rf sputtering, the relative advantages and disadvantages of oxide and metallic targets, and the control of stoichiometry by adjusting the target substrate distance and composition of target.Abstract:
Different thin film fabrication techniques of ferro- and piezoelectric materials is described with special emphasis on rf sputtering. The relative advantages and disadvantages of oxide and metallic targets, and the control of stoichiometry by adjusting the target substrate distance and composition of target is described. The possible applications of ferroelectric films in non-volative memories, pyroelectric detectors, electro- and acousto-optic devices is briefly presented. The applications of these films in the fabrication of integrated Surface Acoustic Wave (SAW) devices on Silicon is discussed in some detail. Theoretical calculations of SAW transduction in layered media is used to compare selected ferroelectric (PZT, PbTiO3. LiNbO3 and BaTiO3) and piezoelectric (ZnO, AIN and CdS) films on silicon for their use in SAW devices.read more
Citations
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Journal ArticleDOI
Ferroelectric thin films prepared by sol-gel processing
Yuhuan Xu,John D. Mackenzie +1 more
TL;DR: In this article, the intrinsic advantages and the recent improvements of the sol-gel processing are surveyed and several interesting topics, including epitaxial growth and grain orientation, symmetric and asymmetric P-E hysteresis loops, heterojunction effect of the interface between film and substrate, to attest pyroelectricity of the films, electrooptic coefficients in poled and unpoled films, possibility of amorphous ferroelectrics, etc., are introduced.
Journal ArticleDOI
Molecular design of improved precursors for the MOCVD of electroceramic oxides
TL;DR: In this article, the molecular design of a number of new oxide precursors is described, illustrating how the replacement of simple alkoxide groups by other groups, such as donor-functionalised alkoxide or β-diketonate ligands, can result in a precursor with improved physical properties and enhanced MOCVD performance.
Journal ArticleDOI
Crystallization of sputtered lead zirconate titanate films by rapid thermal processing
TL;DR: In this article, a rapid thermal annealing (RTA) technique has been employed to process lead zirconate titanate (PZT) films prepared by reactive magnetron sputtering.
Journal ArticleDOI
Some recent developments in the chemical vapour deposition of electroceramic oxides
Anthony C. Jones,Paul R. Chalker +1 more
TL;DR: In this article, the design of new, improved oxide precursors is described, with emphasis on the influence of molecular structure on precursor properties and on the growth dynamics of the MOCVD and ALD processes.
Journal ArticleDOI
Highly oriented lead zirconium titanate thin films: Growth, control of texture, and its effect on dielectric properties
S. Kalpat,K. Uchino +1 more
TL;DR: In this paper, the effects of deposition parameters on the film composition and texture evolution have been established, and the partial pressure of oxygen (O2) and the heating rates during postdeposition anneal have been identified as critical parameters for the growth of highly oriented (111) and (100) PZT films.
References
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Journal ArticleDOI
A method for estimating optimal crystal cuts and propagation directions for excitation of piezoelectric surface waves
J.J. Campbell,W.R. Jones +1 more
TL;DR: In this article, a criterion for judging the relative effeciency of excitation of piezoelectric surface waves as a function of crystal plate orientation and propagation direction is developed based on a velocity change upon application of a thin conducting sheet to the surface.
Journal ArticleDOI
Surface elastic waves
TL;DR: In this article, the propagation of various elastic waves at the surfaces of solids is considered, followed by descriptions of the many ways which have been demonstrated for transduction between surface elastic waves and electromagnetic waves.
Journal ArticleDOI
Ferroelectric (Pb,La)(Zr,Ti)O3 epitaxial thin films on sapphire grown by rf-planar magnetron sputtering
TL;DR: In this paper, Ferroelectric (Pb,La,Zr,Ti)O3 (PLZT) thin films have been epitaxially grown on the c plane of sapphire by rf-planar magnetron sputtering.
Journal ArticleDOI
Calculation of deposition rates in diode sputtering systems
TL;DR: In this paper, the scattering of sputtered atoms by the sputtering gas has been modelled to obtain values for the distances which the atoms travel normal to the target before their energies are reduced to the thermal energy of the gas.
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