Humidity Sensor Using an Air Capacitor
Jin Moon Choi,Tae Wan Kim +1 more
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TLDR
In this paper, the capacitance change of an air capacitor due to moisture in air was first considered theoretically, and was then experimentally verified by an LCR impedance meter with a 100-kHz and 1-V ac.Abstract:
We studied the possibility that an air capacitor can be used as a humidity sensor by measuring capacitance change. In order to investigate the possibility, the change of capacitance of an air capacitor due to moisture in air was first considered theoretically, and was then experimentally verified. The capacitance was measured by an LCR impedance meter with a 100-kHz and 1-V ac. The results revealed that the changes in the experimentally measured capacitances were greater than those in the theoretically calculated values. Based on this fact, we knew that an air capacitor could be used as part of a humidity sensing device. We expect the humidity sensor with an air capacitor has characteristics of fast response time, high reliability, and high durability compared with other conventional methods.read more
Citations
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Rational Design of Capacitive Pressure Sensors Based on Pyramidal Microstructures for Specialized Monitoring of Biosignals
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Lightweight, superelastic boron nitride/polydimethylsiloxane foam as air dielectric substitute for multifunctional capacitive sensor applications
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Enhanced Q double resonant active sensor for humidity and moisture effect elimination
TL;DR: In this paper, a high-resolution ultra-high Q double resonant sensor is developed to eliminate humidity and moisture effect in microwave chemical sensing in uncontrolled environment, and the root of mean square-error of processed results of measuring water in humid air was significantly reduced from 169k down to 27k.
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A 2.92- $\mu$ W Capacitance-to-Digital Converter With Differential Bondwire Accelerometer, On-Chip Air Pressure, and Humidity Sensor in 0.18- $\mu$ m CMOS
TL;DR: This paper presents a sensor front end for air pressure sensor, relative humidity (RH) sensor, and accelerometer in a standard CMOS process, equipped with a wide input range high-resolution capacitance-to-digital converter (CDC).
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A Relative Permittivity-Based Air Pressure Sensor Using Standard CMOS Process
TL;DR: In this article, a novel pressure-sensing technique based on measuring the relative permittivity of air is introduced, which can achieve the full sensing process electrically, from the sensing itself to the readout, with no need for post-processing or mechanical parts.
References
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Physical Chemistry, 2nd Ed.
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CRC handbook of chemistry and physics on CD-ROM
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