Patent
Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions
TLDR
In this article, a method for fabricating a gas separation membrane using MEMS perforations (holes) was proposed. But the perforation can be used to allow chemical components to access both sides of the metal-based layer and temperature sensing devices can also be patterned on the membrane.Abstract:
The present invention relates to gas separation membranes including a metal-based layer (17) having sub-micron scale thicknesses. The metal-based layer (17) can be a palladium alloy supported by ceramic layers such as a silicon oxide layer and a silicon nitride layer. By using MEMS, a series of perforations (holes) (11) can be patterned to allow chemical components to access both sides of the metal-based layer. Heaters and temperature sensing devices can also be patterned on the membrane (16). The present invention also relates to a portable power generation system at a chemical microreactor comprising the gas separation membrane. The invention is also directed to a method for fabricating a gas separation membrane. Due to the ability to make chemical microreactors of very small sizes, a series of reactors can be used in combination on a silicon surface to produce an integrated gas membrane device.read more
Citations
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Journal ArticleDOI
Innovations in palladium membrane research
S. N. Paglieri,J. D. Way +1 more
TL;DR: A review of palladium membrane research can be found in this article, where the authors highlight various aspects of current palladium-based membrane research and serve as a comprehensive bibliography covering palladium preparation methods and applications.
Patent
Cartridge and method for the preparation of beverages
TL;DR: In this article, an inlet for the introduction of an aqueous medium into the cartridge and an outlet for discharge of a beverage produced from the one or more beverage ingredients is a liquid chocolate ingredient.
Patent
Mems-based thin-film fuel cells
TL;DR: In this article, a microelectro-mechanical systems (MEMS) based thin-film fuel cells for electrical power applications are proposed, which can be of a solid oxide type (SOFC), a solid polymer type (SPFC); or a proton exchange membrane type (PEMFC), and each fuel cell basically consists of an anode (46) and a cathode (54) separated by an electrolyte layer.
Patent
Cleaning method and solution for cleaning a wafer in a single wafer process
TL;DR: In this article, the authors present a novel cleaning method and a solution for use in a single wafer cleaning process using ammonium hydroxide (NH4OH), hydrogen peroxide (H2O2), water and a chelating agent.
Patent
Chemical microreactor and method thereof
TL;DR: In this article, a chemical microreactor that provides a means to generate hydrogen fuel from liquid sources such as ammonia, methanol, and butane through steam reforming processes when mined with an appropriate amount of water is discussed.
References
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Journal ArticleDOI
Micromachined Reactors for Catalytic Partial Oxidation Reactions
R. Srinivasan,I-Ming Hsing,Peter E. Berger,Klavs F. Jensen,Samara L. Firebaugh,Martin A. Schmidt,Michael P. Harold,Jan J. Lerou,James F. Ryley +8 more
TL;DR: In this paper, a micro-reactor with submillimeter flow channels with integrated heaters and flow and temperature sensors is described, and the potential application of this reactor to partial-oxidation reactions is explored by using Pt-catalyzed NH 3 oxidation as a model reaction.
Patent
Microcomponent chemical process sheet architecture
Robert S. Wegeng,M. Kevin Drost,Charles J. Call,Carolyn Evans Mcdonald,Dean E. Kurath,Michelle Friedrich,Joseph G. Birmingham +6 more
TL;DR: In this article, a microcomponent chemical process assembly is described, where macroscale unit processes are performed by microscale components, and each microcomponent or plurality of like microcomponents perform at least one chemical process unit operation.
Patent
Membrane filter and a method of manufacturing the same as well as a membrane
TL;DR: In this paper, a microfiltration membrane is used as a support for the deposition of a separation layer for ultrafiltration, gas separation or catalysis, which is very well applicable for the separation of biological cells.
Journal ArticleDOI
Silicon microstructuring technology
TL;DR: In this article, a review of microstructuring techniques for silicon micromachining is presented, where the basic principles are described, the technological realization is discussed and examples for applications in the field of microsensors are given.
Journal ArticleDOI
Investigation of high-temperature degradation of platinum thin films with an in situ resistance measurement apparatus
TL;DR: In this article, a micro-reactor metallization, a 100-nm platinum film with a 10-nm titanium adhesion layer, degrades at temperatures greater than 700/spl deg/C. This degradation was examined with a custom-built high-temperature resistance measurement apparatus in addition to chemical analysis, scanning electron microscopy (SEM), atomic force microscopy and wafer curvature measurements.