Patent
Method of fabricating a cantilever beam for a monolithic accelerometer
TLDR
In this paper, a monolithic accelerometer is fabricated with an integral cantilever beam sensing element which is etched out of a silicon wafer from the back surface, and an integrated circuit is then formed on the front surface and dry etching is used to complete the alignment groove.Abstract:
A monolithic accelerometer is fabricated with an integral cantilever beam sensing element which is etched out of a silicon wafer from the back surface. A thermal silicon oxide is formed on both surfaces of a (100) silicon wafer. Silicon oxide is removed from the back surface in a pattern which defines the sides of the cantilever beam and the sides of an alignment groove. The width and orientation of the openings in the silicon oxide are selected to control the depth of etching when the wafer is subsequently etched with an anisotropic etchant. An integrated circuit is then formed on the front surface and dry etching is used to complete the groove and separate the sides of the beam from the wafer.read more
Citations
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References
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Journal ArticleDOI
A batch-fabricated silicon accelerometer
L.M. Roylance,J.B. Angell +1 more
TL;DR: In this paper, an extremely small batch-fabricatable accelerometer has been developed using silicon IC technology, which is capable of measuring accelerations from 0.001 to 50 g over a 100Hz bandwidth, while readily implemented geometry changes allow these performance characteristics to be varied over a wide range to meet the needs of differing applications.
Patent
Solid state force transducer and method of making same
TL;DR: In this paper, solid state folded leaf spring force transducers are fabricated by batch photolithographic and etching techniques from a monocrystalline material, such as silicon, and the folded leaf structure includes elongated gaps separating adjacent leaf spring leg portions.
Patent
Chemical etching of a semiconductive wafer by undercutting an etch stopped layer
Harry E. Aine,Barry Block +1 more
TL;DR: In this article, a folded cantilever beam supported from a frame and supporting a central structure free to move relative to the frame is fabricated by anisotropic etching through openings in etch stop layers on opposite sides of the substrate wafer.