Patent
Optically controlled mem switches
TLDR
In this paper, an optically controlled microelectromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated.Abstract:
An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.read more
Citations
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TL;DR: In this paper, a light source is provided to direct light to individual optically sensitive elements which control delivery of actuating bias voltage to the MEMS switches, and a structure which conducts the controlling illumination but provides a high impedance electromagnetically reflective surface which reflects electromagnetic radiation over the antenna operating frequency range.
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References
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Patent
Smart antenna system using microelectromechanically tunable dipole antennas and photonic bandgap materials
TL;DR: In this article, a two-dimensional array of microelectromechanical (MEM) transmission line switches is incorporated into the dipole antennas to connect the segments of the antenna arm.
Patent
Article comprising a light-actuated micromechanical photonic switch
TL;DR: In this paper, a light-actuated photonic switch with a photogenerator that powers a micro-electromechanical system (MEMS) switch having very low voltage requirements is described.
Proceedings ArticleDOI
Microactuators for GaAs-based microwave integrated circuits
TL;DR: An approach to the realization of tunable/variable GaAs microwave integrated circuits (MMICs) using micromachined electrostatically controlled actuator technology is described in this article.
Patent
Micro-machined switch and method of fabrication
TL;DR: In this paper, a miniature electrostatically actuated switch and process for fabricating it in which the switch is operable to connect and disconnect one or more transmission lines laid down on a dielectric substrate of an integrated circuit wafer.
Patent
Optical switch, method of manufacturing same, and optical communication equipment using same
Masaya Horino,Kazutaka Sato,Teruhisa Akashi,Masaru Muranishi,Norifumi Komatsu,Dai Kobayashi,Hiroaki Okano +6 more
TL;DR: An optical switch for switching an optical path of an input optical signal comprises a substrate composed of a silica glass substrate, a separation layer formed on the substrate and a plurality of cantilever beams and formed in parallel to one another on the separation layer and connected at their tip ends to a connection member as mentioned in this paper.