WiSpry

About: WiSpry is a based out in . It is known for research contribution in the topics: Capacitor & Antenna (radio). The organization has 72 authors who have published 127 publications receiving 2009 citations.

Trilayered beam MEMS device and related methods

Abstract: Trilayered Beam MEMS Device and Related Methods. According to one embodiment, a method for fabricating a trilayered beam is provided. The method can include depositing a sacrificial layer on a substrate and depositing a first conductive layer on the sacrificial layer. The method can also include forming a first conductive microstructure by removing a portion of the first conductive layer. Furthermore, the method can include depositing a structural layer on the first conductive microstructure, the sacrificial layer, and the substrate and forming a via through the structural layer to the first conductive microstructure. Still furthermore, the method can include the following: depositing a second conductive layer on the structural layer and in the via; forming a second conductive microstructure by removing a portion of the second conductive layer, wherein the second conductive microstructure electrically communicates with the first conductive microstructure through the via; and removing a sufficient amount of the sacrificial layer so as to separate the first conductive microstructure from the substrate, wherein the structural layer is supported by the substrate at a first end and is freely suspended above the substrate at an opposing second end.

A bulk-micromachined bistable relay with U-shaped thermal actuators

Abstract: This paper reports a deep-reactive ion etching (DRIE)-through-etched laterally bistable MEMS relay for power applications, with a primary emphasis on the design and modeling of its U-shaped transient thermal actuators, and a secondary emphasis on the design and fabrication of its contact element. In this relay, a contact crossbar is carried by a curved-beam bistable mechanism , which is toggled by transient U-shaped thermal actuators with their hot beam adiabaticly heated by electrical pulses. Each U-shaped thermal actuator comprises uniform-thickness hot and cold beams with a gap between them so they bend differently. This paper develops both a basic model and a complete model for the actuator that are verified by Finite Element Analysis and serve as effective design tools. The DRIE process creates nonideal etched surfaces, which pose challenges for good relay contacts. Both contact design and process development are discussed to help alleviate this problem. The fabricated relay exhibits a minimum total on-state resistance of 60 m/spl Omega/, and a maximum current carrying capacity of 3 A. It switches with a 1 ms actuation pulse, and a maximum 5 Hz repetition rate.

Thermo-Mechanical Properties of Alumina Films Created Using the Atomic Layer Deposition Technique

Abstract: Interdigitated humidity sensors with atomic layer deposited (ALD) coatings of aluminum oxide demonstrated no leakage current relative to uncoated sensors stored in the ambient, indicating Al2O3 may be used to limit the effects of H2O and other chemical species in miniaturized mechanical- and electronicdevices. The long term durability of such coatings is not known, but may be predicted from the related material characteristics. The modulus and hardness of Al2O3 were therefore measured by nanoindentation using a Berkovich tip. Because the coatings are brittle and possess a significant tensile stress, the influence of film stress on the indentation measurements was quantified using a numerical analysis protocol, which also considered the effect of substrate compliance. The film stress and coefficient of thermal

Compact Quad-Mode Planar Phased Array With Wideband for 5G Mobile Terminals

Abstract: In this paper, a quad-mode endfire planar phased antenna array with wide scan angle and 1.2 mm clearance is proposed for 5G mobile terminals. The proposed antenna can obtain over 8 GHz of impedance bandwidth. In this paper, it is suggested to efficiently combine a multimode array element with different radiation patterns for each mode into a phased antenna array. In the array, similar and wide embedded radiation patterns are obtained for the all four modes. Furthermore, a coaxial to differential stripline transition is designed in this paper. The differential feeding structure is very compact and utilizes only MMPX connector and vias. The total scan pattern and coverage efficiency of the measured and simulated phased array antenna are calculated in the range from 25 to 33 GHz, and good agreement between measured and simulated results is observed. The mean coverage efficiency along the frequency range is very similar, but minor difference in variance of coverage efficiency is observed in the measurements. The coverage efficiency of around 50% for the threshold gain of 5 dBi is achieved in the chosen frequency range.

Tunable impedance matching networks and tunable diplexer matching systems

Abstract: Tunable impedance matching networks and tunable diplexer matching systems are provided A tunable impedance matching network can include an impedance element connected between first and second nodes for communicating signals between the first and second nodes For example, the impedance element can be a transmission line or an inductor Further, the matching network can include a first capacitor connected in parallel with the impedance element, wherein the first capacitor is tunable The matching network can also include a second capacitor compπsing first and second terminals The first terminal of the second capacitor can be connected to the first node The second terminal of the second capacitor can be connected to a local voltage reference for the first node A third capacitor compπses first and second terminals The first terminal of the second capacitor can be connected to the second node The second and third capacitors can also be tunable.