Patent
Ozone gas concentration measurement method, ozone gas concentration measurement system, and substrate processing apparatus
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TLDR
An ozone gas concentration measurement method that can easily measure the concentration of ozone gas is presented in this paper. But the method is not suitable for the measurement of the ozone gas from raw gas containing oxygen.Abstract:
An ozone gas concentration measurement method that can easily measure the concentration of ozone gas. A process gas containing ozone gas is produced from a raw gas containing oxygen gas. The number of moles of gas molecules contained in the process gas is measured. The concentration of the ozone gas contained in the process gas is calculated based on the number of moles of gas molecules contained in the process gas.read more
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References
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Journal ArticleDOI
Absorption Coefficient of Ozone in the Ultraviolet and Visible Regions
Edward C. Y. Inn,Y. Tanaka +1 more
TL;DR: In this article, the absorption coefficients of ozone in the near ultraviolet from the overlapping region at 2000A up to about 3500A and in the visible from about 4000-7500A.
Journal ArticleDOI
The Absorption of Ozone in the Ultra-violet and Visible Regions of the Spectrum
TL;DR: In this article, the absorption coefficient of gaseous ozone was measured for the mercury lines at 2537, 2894, 2967, 3021, 3342, and 5770 A, by measuring the optical absorption and the pressure as the ozone decays in a sealed quartz absorption tube.
Patent
Method and apparatus for measuring ozone gas concentration
TL;DR: In this paper, the ozone gas concentration of the gas to be measured is determined based on both an absorption value of light being detected by the ultraviolet ray absorption type ozone concentration measuring apparatus and an absolute pressure value being detected at the region where the ozone concentration measurement apparatus is disposed.
Patent
Method of controlling ozone generator
TL;DR: In this article, a control signal derived from the gas flow rate is fed to the power supply, influencing its output and thereby affecting the power drawn by the ozone generator, which enables the concentration or the total quantity of the ozone generated to remain relatively constant with varying gas flow rates, or continuously regulate the power level so as to automatically generate the highest possible ozone concentration at any flow rate.
Patent
Method and apparatus for detecting leaks
TL;DR: A leak detection method and apparatus is characterized by the production of analog signals representative of the fluid inlet flow and fluid outlet flow of a closed or open system, and a difference signal is generated which is a function of changes in the flows as discussed by the authors.
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