Processing/observing instrument

TLDR: In this article, a SIM image of a processed cross section of a specimen without changing an angle of the specimen is obtained by using a focused ion beam irradiation (FIB) system.

Abstract: A processing/observing instrument which allows for obtaining a SIM image of a processed cross section of a specimen without changing an angle of the specimen. This processing/observing instrument includes a processing ion beam irradiation system which processes the surface of a specimen with an irradiation of a focused ion beam, an observing ion beam irradiation system which, with an exposure of a focused ion beam, detects secondary ions emitted from the specimen to detect the surface condition of the specimen, a specimen holder which holds the surface of the specimen at a point of intersection of a processing ion beam exposure axis and an observing ion beam exposure axis, and a display which displays the surface condition of the specimen.