SAW-MEMS (surface acoustic waves-micro electro mechanical system) acceleration sensor and manufacturing method thereof

TLDR: In this article, an SAW-MEMS (surface acoustic waves-micro electro mechanical system) acceleration sensor which relates to the field of microelectronic inertial components is presented.

Abstract: The invention discloses an SAW-MEMS (surface acoustic waves-micro electro mechanical system) acceleration sensor which relates to the field of microelectronic inertial components. The acceleration sensor comprises an SAW metal interdigital transducer, a quartz plate and a silicon substrate, wherein the quartz plate is provided with a micro cantilever, and the silicon substrate is provided with a preset groove; the SAW metal interdigital transducer is manufactured on the micro cantilever in the quartz plate; the micro cantilever is bonded on the silicon substrate provided with the preset groove; the quartz plate is thinned through bonding with another silicon substrate without groove firstly, then transferred to the silicon substrate provided with the preset groove by using a bonding process; the SAW metal interdigital transducer is manufactured on the part, corresponding to the preset groove, of the quartz plate; and the micro cantilever structure is etched on the quartz plate, so that the SAW metal interdigital transducer is arranged on the micro cantilever. Because the acceleration sensor disclosed by the invention is prepared by using an MEMS process, the acceleration sensor is small in component size and suitable for mass production, therefore, the acceleration sensor provided by the invention is high in reliability, large in sensitive range, low in power consumption, high in precision, small in size and easy to package.