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Sensitive silicon microphone with wide dynamic range

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TLDR
In this paper, a silicon microphone on which four acoustic transducers are integrated, having different values of sensitivity and, accordingly, different value of dynamic range, is presented, where the analog acoustic signals from the transducers to the integrated circuit device, and are converted to digital acoustic signals, are normalized with respect to the digital acoustic signal output from the acoustic transducer with lowest sensitivity, and the normalized acoustic signals are selectively formed into a composite acoustic signal depending upon the sound pressure of sound waves.
Abstract
A silicon microphone on which four acoustic transducers are integrated, having different values of sensitivity and, accordingly, different values of dynamic range; the analog acoustic signals are supplied from the four acoustic transducers to the integrated circuit device, and are converted to digital acoustic signals; the digital acoustic signal output from the acoustic transducers with relatively high sensitivity acoustic transducers are normalized with respect to the digital acoustic signal output from the acoustic transducer with lowest sensitivity, and the normalized digital acoustic signals are selectively formed into a composite acoustic signal depending upon the sound pressure of sound waves so that the dynamic range is expanded without sacrifice of high sensitivity in the low sound pressure range.

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Citations
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References
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Silicon condenser microphone and manufacturing method

TL;DR: In this article, a silicon condenser microphone package is described, consisting of a transducer unit, a substrate, and a cover, which is attached to the upper surface of the substrate and overlaps at least a portion of the recess.
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Silicon-based sensor system

TL;DR: In this paper, solid state silicon-based condenser microphone systems suitable for batch production are described. But the combination of the different elements forming the microphone system is more flexible compared to any other system disclosed in the prior art.
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Method and device for receiving and treating audiosignals in surroundings affected by noise

TL;DR: In this paper, the authors proposed a method for compensating the sensitivity of microphones by combining the properties of an array of microphones with a method to compensate the electrical signals produced by the microphones.
PatentDOI

Method and apparatus for suppressing an acoustic interference signal in an incoming audio signal

TL;DR: In this paper, a weighted combination of the signals of two or more directional microphones is used to suppress at least one interference signal in an incoming audio signal using a directional microphone system having at least two microphones.
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Optical acoustoelectric transducer

TL;DR: An optical acoustoelectric transducer having uniform amplitude characteristics in a wide frequency range by mixing by a mixer circuit the outputs of a plurality of optical microphones having diaphragms of mutually different thicknesses so as to make the receiving sensitivity uniform in different frequency ranges.