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We show that the first intensity minimum occurs well above 0.5 ML monolayer of the total deposited coverage, which contradicts the common practice of assigning the intensity minimum to 0.5 ML.
This level of precision easily allowed the identification of monolayer coverage.
As the coverage is increased toward the monolayer, the latter site becomes the dominant one.
Additionally, for the first time, the monolayer coverage and fractal-dimension analyses have been reported over a wide range of particle sizes.
The results show agreement among ISS, AES, and crystal current measurements in determination of monolayer coverage.

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