How does the coherence length of a first-order diffraction grating depend on the grating parameters?
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The coherence length of a first-order diffraction grating depends on various grating parameters. The depth and shape of the grating relief can suppress the zero order and affect the diffraction efficiency . The ratio of symmetric-order diffraction efficiency (± 1 orders) can be used to obtain the optical parameters of the grating, and the surface roughness has little impact on this ratio . Grating characterization using scatterometry can provide accurate estimates of the grating parameters, such as height and width, by adjusting the diffraction efficiencies calculated using scalar diffraction and rigorous coupled wave vector diffraction theories . The ability to vary the period of a grating can provide tunability of the diffraction angles, but changing the period may affect the efficiency for each grating period .
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