What is NbTiN film stress?
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NbTiN film stress is influenced by the total pressure of the sputtering process, with films obtained under lower pressures having higher compressive stresses . The best NbTiN films, obtained by DC sputtering, have a compressive stress of -1 GPa . These films have been successfully used as a stripline material for Nb/Al-AlO/sub x//Nb SIS junctions .
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| The provided paper does not mention anything about NbTiN film stress. | |
| The provided paper is about stress formation in boron nitride films, not NbTiN films. The paper does not provide information about NbTiN film stress. | |
1 Citations | The provided paper does not mention anything about NbTiN film stress. |
Open access 06 Nov 2019 | The provided paper does not mention anything about NbTiN film stress. |
37 Citations | The NbTiN films obtained by DC sputtering have a compressive stress of -1 GPa, according to the paper. |
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