What is the chemical process behind lithography that causes the pp filter to change to satin?
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The chemical process behind lithography that causes the PPS filter to change to satin is the degradation of the filter due to the presence of NO (nitric oxide) gas . High temperature and functioning time also contribute to the degradation of the filter . The filter strength reduces with increasing environmental temperature, and the presence of NO is the main factor that causes the reduction in filter strength . The lithographic process involves coating a layer of positive resist material on top of a preexisting layer of a different positive resist material, followed by patternwise exposing and developing both layers . In the start-up optimization of the point of use filter in the lithography process, high flow dispensing and applying back pressure have been found to be effective . Additionally, a measuring method to determine remaining air in the capsule filter has been developed .
Answers from top 5 papers
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| Papers (5) | Insight |
|---|---|
Open access 01 Jan 2007 | The provided paper does not mention the chemical process behind lithography that causes the pp filter to change to satin. The paper focuses on the start-up optimization of the point of use filter and does not provide information on the specific chemical process. |
| The provided paper does not mention the chemical process behind lithography that causes the filter to change to satin. The paper discusses the process for preparing a filter free from resin residues on the glass substrate surface in the photolithographic process. | |
01 Oct 2007 5 Citations | The provided paper does not mention the chemical process behind lithography that causes the pp filter to change to satin. |
| The provided paper does not mention the chemical process behind lithography that causes the pp filter to change to satin. | |
| The provided paper does not discuss the chemical process behind lithography or the change of the PPS filter to satin. |
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