What parameters have been investigated in the field of optimization of polishing of silicon nitride balls?
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The parameters investigated in the field of optimization of polishing of silicon nitride balls include NH3 flow rate .
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| Papers (5) | Insight |
|---|---|
2 Citations | The provided paper does not investigate the optimization of polishing of silicon nitride balls. |
28 Citations | The provided paper is about the optimization of precision grinding of silicon, not polishing of silicon nitride balls. Therefore, the paper does not investigate the parameters for the optimization of polishing of silicon nitride balls. |
30 Citations | The provided paper is about the optimization of the chemical mechanical polishing process for optical silicon substrates. It does not mention the investigation of parameters for the polishing of silicon nitride balls. |
| The provided paper is about the optimization of polishing Si (100), not silicon nitride balls. The answer to the query is not present in the paper. | |
| The provided paper is about the optimization of the plasma polishing process for fused silica substrates. It does not mention the investigation of parameters for the polishing of silicon nitride balls. |
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