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A. O. Zamchiy

Researcher at Novosibirsk State University

Publications -  39
Citations -  266

A. O. Zamchiy is an academic researcher from Novosibirsk State University. The author has contributed to research in topics: Silicon & Thin film. The author has an hindex of 9, co-authored 32 publications receiving 162 citations. Previous affiliations of A. O. Zamchiy include Russian Academy of Sciences.

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Synthesis of Amorphous Silicon Films With High Growth Rate by Gas-Jet Electron Beam Plasma Chemical Vapor Deposition Method

TL;DR: In this paper, a gas-jet electron beam plasma chemical vapor deposition method for high-rate deposition of thin silicon films is presented, based on the activation of initial gas molecules by electron beam and fast convective transfer of the radicals to a substrate by means of a supersonic free jet.
Journal ArticleDOI

Determination of the oxygen content in amorphous SiOx thin films

TL;DR: The bonding structure and composition of amorphous silicon suboxide (a-SiOx, 0.25 ) have been studied in this paper, where the bonding structure of a-Siox has been analyzed.