A
A. Shahriar
Researcher at University of Texas at Austin
Publications - 1
Citations - 96
A. Shahriar is an academic researcher from University of Texas at Austin. The author has contributed to research in topics: Work function & Tantalum nitride. The author has an hindex of 1, co-authored 1 publications receiving 89 citations.
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Characterization of resistivity and work function of sputtered-TaN film for gate electrode applications
TL;DR: In this article, the resistivity, crystallinity, and work function of Tantalum nitride (TaN) films were investigated as a function of nitrogen flow rate, and the work function increased to 4.5-4.7 eV with less dependency on the nitrogen flow rates.