Electron emission from ferroelectrics (FEE) is an unconventional electron emission effect. Methods of FEE excitation are quite different compared to classic electron emission from solids. Two kinds of FEE have been observed, “weak” and “strong.” “Weak” electron emission (current density 10−12–10−7 A/cm2) occurs from polar surfaces of ferroelectric materials in the ferroelectric phase only. A source of the electric field for “weak” FEE excitation is an uncompensated charge, generated by a deviation of macroscopic spontaneous polarization from its equilibrium state under a pyroelectric effect, piezoelectric effect, or polarization switching. The FEE is a tunneling emission current which screens uncompensated polarization charges. It is shown that the FEE is an effective tool for direct domain imaging and studies of electronic properties of ferroelectrics. “Strong” FEE, which is 10–12 orders of magnitude higher than “weak” FEE, achieves 100 A/cm2 and is plasma-assisted electron emission. Two modes of the sur...

Electron emission from ferroelectrics

Many methods of reproducing nuclear fusion — the process that powers the Sun — at the table-top scale have been tried, but failed to convince. Remember ‘cold fusion’? More recently, fusion linked to sonoluminescence is still controversial. Now comes a claim from the labs of the University of California at Los Angeles of unequivocal evidence of nuclear fusion in a simple room-temperature experiment. They report that gently heating a pyroelectric crystal — material that becomes charged when heated — causes ionization of a surrounding deuterium gas. The ions bombard a deuterated solid target with such energy that a large neutron signal is detected, a hallmark of deuterium fusion. Though not a viable power source, ‘crystal fusion’ may find application as a generator of neutrons for imaging technology. While progress in fusion research continues with magnetic1 and inertial2 confinement, alternative approaches—such as Coulomb explosions of deuterium clusters3 and ultrafast laser–plasma interactions4—also provide insight into basic processes and technological applications. However, attempts to produce fusion in a room temperature solid-state setting, including ‘cold’ fusion5 and ‘bubble’ fusion6, have met with deep scepticism7. Here we report that gently heating a pyroelectric crystal in a deuterated atmosphere can generate fusion under desktop conditions. The electrostatic field of the crystal is used to generate and accelerate a deuteron beam (> 100 keV and >4 nA), which, upon striking a deuterated target, produces a neutron flux over 400 times the background level. The presence of neutrons from the reaction D + D → 3He (820 keV) + n (2.45 MeV) within the target is confirmed by pulse shape analysis and proton recoil spectroscopy. As further evidence for this fusion reaction, we use a novel time-of-flight technique to demonstrate the delayed coincidence between the outgoing α-particle and the neutron. Although the reported fusion is not useful in the power-producing sense, we anticipate that the system will find application as a simple palm-sized neutron generator.

Observation of nuclear fusion driven by a pyroelectric crystal

A semiconductor substrate processing system includes a chamber that includes a processing region and a substrate support. The system includes a top plate assembly disposed within the chamber above the substrate support. The top plate assembly includes first and second sets of plasma microchambers each formed into the lower surface of the top plate assembly. A first network of gas supply channels are formed through the top plate assembly to flow a first process gas to the first set of plasma microchambers to be transformed into a first plasma. A set of exhaust channels are formed through the top plate assembly. The second set of plasma microchambers are formed inside the set of exhaust channels. A second network of gas supply channels are formed through the top plate assembly to flow a second process gas to the second set of plasma microchambers to be transformed into a second plasma.

Semiconductor Processing System Having Multiple Decoupled Plasma Sources

Fundamental aspects of energy dissipation in friction.

In recent years ferroelectric domain patterning has become a popular topic of physical research because it enables photonic applications as well as data storage. For generation of tailored domain structures and for further understanding of ferroelectricity, a visualization of the domain patterns is required. A large number of imaging techniques have therefore been developed. This review summarizes these techniques and highlights systematically their strengths and weaknesses.

Visualization of ferroelectric domains in bulk single crystals

Strong pulsed electron emission has been observed from 12/65/35 lead lanthanum zirconate titanate ceramic composition in two different nonswitched phases at room temperature and at the temperature 100 °C. The electron emission parameters of this composition appear to be independent of phase for the two phases investigated. Fast photography and direct observation show that the strong electron emission occurs from the surface discharge plasma. The new experimental data make it possible to demonstrate the validity of the Child–Langmuir law for this electron emitter. A pulsed plasma lead lanthanum zirconate titanate ceramic cathode with burst frequency up to 100 kHz and collector current density up to 10 A/cm2 is developed.

Plasma‐assisted electron emission from (Pb,La)(Zr,Ti)O3 ceramic cathodes

A new mechanism of polarization switching and electron emission in ferroelectric cathodes is proposed. Surface flashover plasma of a ferroelectric origin was observed on a polar ferroelectric surface [D. Shur, G. Rosenman, and Ya. E. Krasik, Appl. Phys. Lett. 70, 574 (1997)]. Simultaneous measurements of switched charge and plasma density show that expanding surface plasma represents a dynamic switching electrode. Direct measurements of ion/electron emission currents and surface analysis implemented by different analytic tools indicate that electrons and ions from the surface plasma contribute to spontaneous polarization screening. The high energy of charged particles emitted from the surface plasma is ascribed to a high surface potential during polarization switching.

Polarization switching in ferroelectric cathodes

A flashover plasma has been induced by spontaneous polarization switching on a polar surface of the ferroelectric crystal triglycine sulphate (TGS). The effect has not been observed in the paraelectric phase. The threshold switching voltage for a surface flashover ignition was as low as 100 V for pulsed and ac voltage. A mechanism of plasma initiation on a ferroelectric surface is proposed. It is assumed that the plasma is ignited by electron emission initiated by polarization switching. Subsequent electron avalanching occurs as a result of the high potential gradient along the ferroelectric surface caused by inhomogeneous polarization switching. Electrons and ions with energies up to several hundreds of eV were been recorded due to a high surface potential of the switched ferroelectric.

Surface discharge plasma induced by spontaneous polarization switching

Ferroelectric electron emission observed under periodic spontaneous polarization switching is the basis for the development of a new type of flat panel display. Electron emission occurs from individually operated ferroelectric domains. It is shown that ferroelectric displays may be fabricated in ‘‘plane‐to‐plane’’ geometry which is not possible for field emission displays.

D. Shur

Papers

Electron emission from ferroelectrics

Plasma‐assisted electron emission from (Pb,La)(Zr,Ti)O3 ceramic cathodes

Polarization switching in ferroelectric cathodes

Surface discharge plasma induced by spontaneous polarization switching

Ferroelectric electron emission flat panel display