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Daniel Ian Mansfield

Researcher at University of Leicester

Publications -  23
Citations -  245

Daniel Ian Mansfield is an academic researcher from University of Leicester. The author has contributed to research in topics: Surface roughness & Reference surface. The author has an hindex of 9, co-authored 23 publications receiving 225 citations.

Papers
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Journal ArticleDOI

Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics.

TL;DR: A new method of calibration and adjustment using a silica micro-sphere as a calibration artifact is introduced and a straightforward method to correct for phase and amplitude imperfections in the TF is described using a modified inverse filter.
Patent

Apparatus for and a method of determining surface characteristics

TL;DR: In this article, a data processor (32) receives first intensity data comprising a first series of intensity values resulting from a measurement operation on a surface area of a substrate and second intensity values comprising at least a second series of intensities resulting from measuring a surface of a thin film structure.
Proceedings ArticleDOI

Application of linear systems theory to characterize coherence scanning interferometry

TL;DR: In this paper, the authors considered coherence scanning interferometry as a linear filtering operation that is characterised by a point spread function in the space domain or equivalently a transfer function in frequency domain.
Journal ArticleDOI

Measurement of thin film interfacial surface roughness by coherence scanning interferometry

TL;DR: In this article, the authors verify a new technique which uses a first order Taylor expansion of the Helical Complex Field (HCF) function to determine the interfacial topographies at each pixel, so avoiding a heavy computation.
Patent

Apparatus for and a method of determining a characteristic of a layer or layers

TL;DR: In this paper, a layer structure determiner (100) determines a frequency transform ratio corresponding to a ratio between the first and second intensity data and fits a layer model having variable model parameters related to the layer thicknesses and refractive indices of the layers of a layer.