E
Eberhard Manske
Researcher at Technische Universität Ilmenau
Publications - 96
Citations - 774
Eberhard Manske is an academic researcher from Technische Universität Ilmenau. The author has contributed to research in topics: Interferometry & Laser. The author has an hindex of 13, co-authored 96 publications receiving 624 citations.
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New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes
TL;DR: In this article, a focus probe with a spot size of approximately 0.5 µm, a working distance of 1.5 mm and a resolution of less than 1 nm was developed and adopted in the NPM-machine.
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The Metrological Basis and Operation of Nanopositioning and Nanomeasuring Machine NMM-1Metrologische Grundlagen und Wirkungsweise der Nanopositionier- und Messmaschine NMM-1
TL;DR: In this paper, the set-up, function and measurement results of some zero-point nanoprobes in combination with the nanomeasuring machine are explained, as well as various applications of the NMM-1 are based on the installation of optical and tactile nanoprobs above the 3D nanopositioning stage.
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Challenges and trends in manufacturing measurement technology – the“Industrie 4.0” concept
Dietrich Imkamp,Jürgen Berthold,Michael Heizmann,Karin Kniel,Eberhard Manske,Martin Peterek,Robert Schmitt,Jochen Seidler,Klaus-Dieter Sommer +8 more
TL;DR: The Manufacturing Metrology Roadmap 2020 of the VDI/VDE Society for Measurement and Automatic Control (GMA) was published in 2011 as mentioned in this paper, covering new developments in the field of the Industrial 4.0 concept and presented with expanded and updated content.
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Nanomessmaschine zur abbefehlerfreien Koordinatenmessung (Nano Measuring Machine for Zero Abbe Offset Coordinate-measuring)
TL;DR: In this article, a Nanomessmaschine for the dreidimensionale Koordinatenmessung with an Auflösung of 1,24 nm is presented.
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Investigations and calculations into decreasing the uncertainty of a nanopositioning and nanomeasuring machine (NPM-Machine)
TL;DR: In this paper, an improved weight force compensation arrangement adaptable to different object masses was developed and tested to minimize the undesired heat production by the non-self-locking vertical linear drive systems, and a modified structure with increased stiffness of the vertical drive system was designed to improve the NPM's dynamic behaviour.