F
Fei-Lung Lai
Researcher at TSMC
Publications - 17
Citations - 220
Fei-Lung Lai is an academic researcher from TSMC. The author has contributed to research in topics: Layer (electronics) & Field-effect transistor. The author has an hindex of 6, co-authored 17 publications receiving 220 citations.
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Patent
Backside sensing bioFET with enhanced performance
TL;DR: In this paper, a bio-field effect transistor (BioFET) and a method of fabricating a BioFET device are described using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process.
Patent
Backside CMOS compatible bioFET with no plasma induced damage
TL;DR: In this article, a bio-field effect transistor (BioFET) device and methods of fabricating a BioFET and a bioFET device are presented, using one or more process steps compatible with or typical to a complementary metaloxide-semiconductor (CMOS) process.
Patent
Systems and methods for signal amplification with a dual-gate bio field effect transistor
TL;DR: In this article, a bio-field effect transistor (BioFET) and a method of fabricating a BioFET device are presented, which includes a substrate; a gate structure disposed on a first surface of the substrate and an interface layer formed on the second surface of a substrate.
Patent
Biofet with increased sensing area
TL;DR: In this article, a bio-field effect transistor (BioFET) and a method of fabricating a BioFET device are described using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process.
Patent
Integrated electro-microfluidic probe card, system and method for using the same
TL;DR: In this article, the authors present a wafer-level bio-sensor processing tool for aligning a Wafer, mounting the integrated electro-microfluidic probe card, flowing a test fluid, and measuring electrical properties.