Patent
Backside CMOS compatible bioFET with no plasma induced damage
TLDR
In this article, a bio-field effect transistor (BioFET) device and methods of fabricating a BioFET and a bioFET device are presented, using one or more process steps compatible with or typical to a complementary metaloxide-semiconductor (CMOS) process.Abstract:
The present disclosure provides a bio-field effect transistor (BioFET) device and methods of fabricating a BioFET and a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET device includes a gate structure disposed on a first surface of a substrate and an interface layer formed on a second surface of the substrate. The substrate is thinned from the second surface to expose a channel region before forming the interface layer.read more
Citations
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Methods and apparatus for measuring analytes using large scale fet arrays
TL;DR: In this article, a flow expansion chamber is configured to allow fluids to flow from the expansion chamber to the outlet portion and to allow the fluids to interact along the way with material in the array of wells.
Patent
Chemically sensitive sensor with lightly doped drains
TL;DR: In this article, a chemically sensitive sensor with a lightly doped region that affects an overlap capacitance between a gate and an electrode of the chemical sensitive sensor is presented, where the region extends beneath and adjacent to a gate region.
Patent
Ion-sensing charge-accumulation circuits and methods
TL;DR: An ion-sensitive circuit can include a charge accumulation device, to accumulate a plurality of charge packets as a function of an ion concentration of a fluid, and at least one control and readout transistor, to generate an output signal as the accumulated plurality of charges, the output signal representing the ion concentration as discussed by the authors.
Patent
Backside sensing bioFET with enhanced performance
TL;DR: In this paper, a bio-field effect transistor (BioFET) and a method of fabricating a BioFET device are described using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process.
Patent
CMOS compatible BioFET
TL;DR: In this article, a bio-field effect transistor (BioFET) and a method of fabricating a BioFET device are presented, using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process.
References
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Patent
Biosensor and related method
TL;DR: In this paper, a micro-scale biosensor for use in the detection of target biological substances including molecules and cells is presented, which is a microfluidic system with integrated electronics, inlet-outlet ports and interface schemes, high sensitivity detection of pathogen specificity, and processing of biological materials at semiconductor interfaces.
Patent
Nucleic acid amplification using microfluidic devices
TL;DR: In this paper, a rotary microfluidic channel and a plurality of temperature regions at different locations along the rotary channel at which temperature is regulated are used for thermal cycling reactions.
Patent
Field Effect Transistor and Method for Manufacturing the Same
Tsutomu Tezuka,Eiji Toyoda +1 more
TL;DR: In this article, a method for manufacturing a field effect transistor is described, which includes: forming a mask of an insulating film on a semiconductor layer containing Si formed on a silicon substrate; forming the semiconductor layers into a mesa structure by performing etching with the use of the mask; narrowing a distance between two sidewalls of the mesa and flattening the sidewalls by performing a heat treatment in a hydrogen atmosphere.
Patent
Nanobiosensor and carbon nanotube thin film transistors
TL;DR: In this article, a system and methods for detecting biological and chemical species in liquid and gaseous phase using carbon nanotubes was proposed. But the method was limited to detecting a wide range of concentrations.
Patent
DNA sequencing and amplification systems using nanoscale field effect sensor arrays
Rashid Bashir,Ashraf Alam,Demir Akin,Oguz H. Elibol,Bobby Reddy,Donald E. Bergstrom,Yi-Shao Liu +6 more
TL;DR: In this paper, field effect chemical sensor devices are used for chemical and/or biochemical sensing, and methods for single molecule detection are described. But they are not useful for amplification of target molecules by PCR.