Hoomi Choi

TL;DR: In this paper, a new dry cleaning process using a CO"2 gas cluster beam is developed and a characterization method for gas cluster generation was studied experimentally, and the results showed that the contaminants were successfully removed without damage to the wafer surface.

TL;DR: In this article, the influence of ion fluence, implantation and subsequent annealing temperatures on the blistering and exfoliation was studied by Rutherford Backscattering Spectroscopy (RBS), optical microscopy, high resolution X-ray diffraction (XRD) and cross-sectional transmission electron microscopy (XTEM).

TL;DR: In this article, a plasminar dense Al2O3 film was formed on a silicon substrate through the atmospheric aerosol spray method (AAS), which is a novel powder spray method, which can form a film under atmospheric pressure and low temperature conditions.

TL;DR: In this article, the size distribution of positively and negatively charged Si gas phase nuclei generated during hot wire CVD under 1.5 torr was firstly measured, and the particle diameter at the peak of the size distributions was about 10 ∼ 13 nm.

TL;DR: In this article, a particle beam mass spectrometer (PBMS) was used to measure a size distribution of nanoparticles under the deposition condition of silicon thin films, which showed that both positively and negatively charged silicon nanoparticles were abundantly generated in the gas phase.