Showing papers in "Microelectronic Engineering in 2013"

TL;DR: In this paper, the effect of synthesis conditions on the properties of iron oxide nanoparticles is not sufficiently understood, and it is found that the addition of citric acid at different stages can alter the nanoparticle core size, while the coating temperature affects the nanoparticles adsorption around nanoparticles surface and alters nanoparticle hydrodynamic size.

TL;DR: In this paper, a detailed physical analysis of the conductive filament electrically formed in HfO2-based resistive switching memory devices with both Hf and Ti metal oxygen exchange layers is presented.

TL;DR: An overview of the most recent developments on phase change physics and technology, pointing out the key topics requiring additional investigation and further understanding can be found in this article, where the phase change memory technology (PCM) has been one of the relevant novelties in the field of semiconductor memories.

TL;DR: In this paper, an auto-TTV method was developed for the wafer-on-a-wafer (WOW) application, which measured wafer thickness and parallelity between grinder and wafer surface.

TL;DR: In this article, a simple and low-cost fabrication method is demonstrated to make super-hydrophobic and super-oleophobic Aluminum (Al) surfaces, which have hierarchical structures mimicking the lotus leaf.

TL;DR: In this article, a nanothin NbO"2-layer-based Pt/NbO 2/Pt stack was constructed and its threshold-switching characteristics were investigated at the nanoscale.

TL;DR: In this paper, an easy to fabricate and low-cost, resistive-type CO"2 gas sensor made of poly(3,4-ethylenedioxythiophene) (PEDOT) and branched polyethylenimine (BPEI) layers was fabricated on an interdigitated electrode.

TL;DR: In this paper, a tetra methyl ammonium hydroxide (TMAH) was used as the cleaning agent and arginine as the chelating agent to remove BTA and silica particles from the copper surface.

TL;DR: A potassium ion conducting polymer blend electrolyte based on polyvinyl chloride (PVC) and polyethylene oxide (PEO) complexed with KBr was prepared using solution cast technique as discussed by the authors.

TL;DR: In this article, the experimental XPS and absorption spectra for crystalline HfO2 in frame of hybrid DFT were calculated for bombarding with Ar-ions hafnia and HfOx.

TL;DR: In this article, a high-aspect-ratio line-and-space (L&S) pattern is transferred via RTR UV-NIL, and this technology can be applied to wire-grid polarizers, flexible displays and solar panels.

TL;DR: In this article, a thin liquid jet of solution containing ZrO"2 (Zirconium Dioxide) nanoparticles was generated through a metallic capillary with a constant flow rate under the electrical forces.

TL;DR: In this paper, three different types of silicon/MWCNT composite electrodes were prepared with dispersing different amount of MWCNT (10wt.%, 30wt., 50wt.%) by high energy mechanical milling method.

TL;DR: In this article, the degradation and breakdown of polycrystalline high-? (HK) dielectric films were investigated using conductive-atomic force microscopy (C-AFM).

TL;DR: In this article, the degradation mechanisms induced by off-state and on-state stress in AlGaN/GaN HEMTs were investigated and the influence of the reverse voltage as degradation accelerating factor was also provided.

TL;DR: In this paper, a nano-scale pattern of porous alumina membrane mask was transferred to the UV-curable precursor with high fidelity by a fabrication process conducted at room temperature and normal atmosphere.

TL;DR: In this article, atomic layer etching (ALET) was used to etch BeO as the interface passivation layer between a high-k dielectric and a III-V compound semiconductor substrate in metaloxide-semiconductor (MOS) devices.

TL;DR: In this article, a microfluidic device with integrated ZnO nanowires (NWs) was used for photodegradation studies of organic dye under continuous flow conditions.

TL;DR: In this paper, a wide O-Si-O angles in bulk amorphous silica are shown to trap electrons and the electron levels appear 3.2eV below the bottom of the silica conduction band.

TL;DR: In this paper, a process for fabricating phase and absorption gratings with periods of few micrometers and high aspect ratios is presented, with a particular focus on two-dimensional grating structures.

TL;DR: In this article, the authors investigated the effects of laser pulse parameters, the adhesive layer properties, and the method of wafer dicing on the transfer rate and placement precision/accuracy when transferring ultrathin ([email protected] thick) silicon dice using the thermo-mechanical selective laser assisted die transfer (tmSLADT) technique developed by this team and reported in prior publications.

TL;DR: In this paper, a conformal cobalt film on a trench pattern was created by chemical vapor deposition (CVD) using octacarbonyl dicobalt [Co"2(CO)"8] and hexacarbaronyl tungsten [W(CO)6] as precursors.

TL;DR: In this paper, a simple low cost and quality method is developed for densifying vertically-aligned carbon nanotube (VA-CNTs) forests at room temperature, which is used to serve as a solvent carrier.

TL;DR: In this article, four nanostructures (ZnO, Cu, ZnO and ZnS) were successfully synthesized and characterized for the photoanode of the dye-sensitized solar cells.

TL;DR: In this paper, a double-layer resist system was proposed to create dense structures by EBL utilizing a layer of polymethyl-methacrylate (PMMA) as sacrificial layer beneath a HSQ layer.

TL;DR: In this paper, the authors investigated the width-dependent performance of armchair GNRs-FETs by analytical modeling and showed that nanoribbon widths of about 3-4nm at most are required to obtain optimum on/off performance.

TL;DR: In this paper, a potential barrier formed at the contact interface of an Al/Alq"3/p-Si Schottky diode was investigated and a linear relationship of 1/C^2vs. V plot under reverse bias was shown and the effective barrier height was 0.69eV by capacitance-voltage (C-V) measurement.

TL;DR: In this paper, the authors present a non-conventional bulk micromachining process of SiC substrate directed to fabrication of MEMS sensors based on III-nitrides (III-N) material systems for harsh environment.

TL;DR: In this paper, an impact-based wind energy harvesting system composed of a thin metal sheet, a MEMS piezoelectric energy harvesting element, a rigid stop, a fixture and a bluff body was designed.

TL;DR: In this paper, atomic layer deposition (ALD) processes and process integration for the deposition of insulating liners, copper diffusion barriers, and seed layers for direct copper plating in high aspect ratio (>20:1) through silicon vias.