J
J. Horkans
Researcher at IBM
Publications - 18
Citations - 2430
J. Horkans is an academic researcher from IBM. The author has contributed to research in topics: Catalysis & Copper plating. The author has an hindex of 11, co-authored 18 publications receiving 2368 citations.
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Journal ArticleDOI
Damascene Copper electroplating for chip interconnections
TL;DR: The challenges of filling trenches and vias with Cu without creating a void or seam are reviewed, and the discovery that electrodeposition can be engineered to give filling performance significantly better than that achievable with conformal step coverage is found.
Damascene copper electroplating for chip interconnections
TL;DR: Damascene copper electroplating for on-chip interconnections, a process that was conceived and developed in the early 1990s, makes it possible to fill submicron trenches and vias with copper without creating a void or a seam and has thus proven superior to other technologies of copper deposition as discussed by the authors.
Journal ArticleDOI
Electrochemical Fabrication of Mechanically Robust PbSn C4 Interconnections
Madhav Datta,Ravindra Vaman Shenoy,Christopher V. Jahnes,P. C. Andricacos,J. Horkans,John Owen Dukovic,Lubomyr T. Romankiw,Jeffrey Frederick Roeder,Hariklia Deligianni,H Nye,Birenda Nath Agarwala,H.M. Tong,P. Totta +12 more
TL;DR: In this article, the feasibility of electrochemically fabricating highly reliable PbSn (97/3) C4 structures with a high degree of dimensional uniformity on a variety of wafer sizes ranging up to 200 mm.
Journal ArticleDOI
Determination of Partial Currents for CuNi and CuCo Electrodeposition Using Rotating Ring‐Disk Electrodes
TL;DR: An electrochemical stripping technique has been developed for the analysis of Cu alloys with iron-group metals (particularly Ni), and the alloy is plated on the disk of a rotating ring disk electrode as mentioned in this paper.
Journal ArticleDOI
Film thickness effects on hydrogen sorption at palladium electrodes
TL;DR: The dependence of hydrogen sorption charge on Pd morphology could be explained by segregation of sorbed hydrogen at grain boundaries as mentioned in this paper, which was shown to have a high resistance to hydrogen diffusion.