scispace - formally typeset
J

J. R. A. Cleaver

Researcher at University of Cambridge

Publications -  26
Citations -  291

J. R. A. Cleaver is an academic researcher from University of Cambridge. The author has contributed to research in topics: Ion beam & Quantum tunnelling. The author has an hindex of 11, co-authored 26 publications receiving 289 citations.

Papers
More filters
Journal ArticleDOI

Application of a focused ion beam system to defect repair of VLSI masks

TL;DR: In this paper, a scanning ion beam lithography system was used for the rework of chromium-on-glass mask plates to repair defects in the VLSI circuit pattern.
Journal ArticleDOI

Channelling ion image contrast and sputtering in gold specimens observed in a high-resolution scanning ion microscope

TL;DR: In this paper, the interdependence of directional effects on the sputtering rate and the secondary-electron emission from materials, both of which are affected by ion channelling, was investigated.
Journal ArticleDOI

Focused ion beam repair techniques for clear and opaque defects in masks

TL;DR: In this paper, focused ion beam processes for the repair of both opaque and clear defects in chromium-on-glass mask plates are considered, and a novel process for the deposition of opaque carbon films for repair of clear defects is described and compared with the use of light-scattering grating structures sputtered into the glass.
Journal ArticleDOI

Fabrication of submicrometer freestanding single‐crystal gallium arsenide and silicon structures for quantum transport studies

TL;DR: In this article, the fabrication of three-terminal freestanding GaAs metal-semiconductor field effect transistor structures is described and the low-temperature properties for semiconductors and metals such as AuPd are compared.
Journal ArticleDOI

Electron heating effects in free-standing single-crystal GaAs fine wires

TL;DR: In this paper, the authors report on experiments and their analysis on electron heating effects in 3.2 mu m long free-standing fine wires (triangular cross-section with approximately=0.5 mu m side) of single-crystal GaAs doped at 1017 cm-3.