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Jun Hatakeyama

Researcher at Shin-Etsu Chemical

Publications -  330
Citations -  8041

Jun Hatakeyama is an academic researcher from Shin-Etsu Chemical. The author has contributed to research in topics: Resist & Alkyl. The author has an hindex of 43, co-authored 330 publications receiving 8039 citations. Previous affiliations of Jun Hatakeyama include Takeda Pharmaceutical Company.

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Patent

Chemically amplified positive resist composition, patterning process, and acid-decomposable keto ester compound

TL;DR: A chemically amplified positive resist composition comprises an acid-decomposable keto ester compound of the steroid skeleton which is insoluble in alkaline developer, but turns soluble in acid under the action of acid.
Patent

生体電極組成物、生体電極、生体電極の製造方法、及び高分子化合物

TL;DR: In this paper, the authors describe a scenario where a person is confronted with a situation where he or she has to decide whether or not to respond to a message from another person.
Patent

Organic silicon compounds, hydrolyzates thereof, and rubber plasticizers

TL;DR: In this paper, a novel organic silicon compound and hydrolyzate thereof are provided in which an alkoxysilane having an alkoxy radical attached to the silicon atom is attached to a polyester through an alkylene radical.
Patent

Method for forming multilayer film and pattern forming method

TL;DR: In this paper, a method for forming a multilayer film to be used as a resist underlay film in lithography is presented, which is useful for a pattern forming method at high dimensional accuracy in dry etching.
Patent

Polymerizable monomer, polymer compound, resist material and pattern forming method

TL;DR: In this article, the problem of providing a polymerizable monomer for a resist material, which has excellent transparency to KrF laser light, Arf laser light and Flaser light and excellent development characteristics and allows formation of a negative pattern having a high contrast, high resolution and excellent etching durability and insoluble with an alkali developer is solved.