Kay Gastinger

TL;DR: In this article, an array type of micromachined Mirau interferometers, operating in the regime of low coherence interferometry (LCI) and adapted for massively parallel inspection of MEMS, is presented.

TL;DR: In this paper, the authors present the optical, mechanical, and electro-optical design of an interferometric inspection system for massive parallel inspection of MicroElectroMechanicalSystems (MEMS) and MicroOptoElectronMechanical Systems (MOEMS).

TL;DR: Low Coherence Speckle Interferometry (LCSI) as discussed by the authors combines the depth-resolved measurement of Low Coherence Interference (LCI) with the high-accuracy deformation measurement of Electronic Spearle Pattern InterFERometry (ESPI) to characterize the behavior of interfaces in multi-layer materials or structures.

TL;DR: Different approaches to overcome the large ratio between wafer size and feature size in the testing step of micro production are introduced and advancements compared to the state of the art are introduced within the following fields.

TL;DR: In this paper, the theoretical background and basic principles of Low Coherence Speckle Interferometry (LCSI) are described, and the main parts of the research work are briefly introduced; (1) the development of a dual wavelength, open-path LCSI setup (2) the introduction of a new method for the detection of zero path length difference for temporal phase shifting (3) the optimisation of the optical parameters of LCSI to increase the probing depth (beam impedance, position of the coherence layer and imaging parameters) (4) the fundamental understanding of