K
Kurt Matoy
Researcher at Infineon Technologies
Publications - 20
Citations - 440
Kurt Matoy is an academic researcher from Infineon Technologies. The author has contributed to research in topics: Layer (electronics) & Fracture toughness. The author has an hindex of 7, co-authored 19 publications receiving 354 citations. Previous affiliations of Kurt Matoy include University of Leoben & Austrian Academy of Sciences.
Papers
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A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films
Kurt Matoy,Helmut Schönherr,Thomas Detzel,Thomas Schöberl,Reinhard Pippan,Christian Motz,Gerhard Dehm,Gerhard Dehm +7 more
TL;DR: In this paper, a comprehensive study on the mechanical behavior of plasma enhanced chemical vapor deposited silicon oxide, oxynitride and nitride thin films is provided, and the results are compared with standard nanoindentation measurements.
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Interface fracture properties of thin films studied by using the micro-cantilever deflection technique
Kurt Matoy,Kurt Matoy,Thomas Detzel,Matthias Müller,Christian Motz,Gerhard Dehm,Gerhard Dehm +6 more
TL;DR: In this paper, the authors investigated the mechanical behavior of interfaces between silicon oxide and metallic thin films using an alternative approach which is based on the miniaturized cantilever deflection technique.
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On the influence of microcantilever pre-crack geometries on the apparent fracture toughness of brittle materials
TL;DR: In this paper, the influence of the pre-crack geometry on the apparent fracture toughness is provided. Butler et al. show that the effect of material bridges and the impact of rounded precrack corners when two dimensional models are employed to evaluate the fracture toughness.
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Fracture toughness of intermetallic Cu6Sn5 in lead-free solder microelectronics
Bastian Philippi,Kurt Matoy,Johannes Zechner,Christoph Kirchlechner,Christoph Kirchlechner,Gerhard Dehm +5 more
TL;DR: In this article, micro-cantilever fracture testing is applied on FIB-prepared single-crystalline Cu 6 Sn 5 cantilevers to clarify on the microstructure-fracture relationship.
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Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers
TL;DR: In this article, miniaturized monolithic cantilevers of thermally grown silicon oxide and multi-layer cantilever of plasma enhanced chemical vapor deposited silicon oxide, nitride were mechanically characterized.